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Campbell, SA
Gilmer, DC
Kaushik, V
Conner, J
Prabhu, L
Anderson, A
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Authors:
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Gilmer, DC
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Wilk, GD
Campbell, SA
Roberts, J
Gladfelter, WL
Citation: Cj. Taylor et al., Does chemistry really matter in the chemical vapor deposition of titanium dioxide? Precursor and kinetic effects on the microstructure of polycrystalline films, J AM CHEM S, 121(22), 1999, pp. 5220-5229
Authors:
Colombo, DG
Gilmer, DC
Young, VG
Campbell, SA
Gladfelter, WL
Citation: Dg. Colombo et al., Anhydrous metal nitrates as volatile single source precursors for the CVD of metal oxide film, CHEM VAPOR, 4(6), 1998, pp. 220