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Authors: HEISSMEIER M SHERIDAN JT SCHWIDER J
Citation: M. Heissmeier et al., CALIBRATION OF A MICROLITHOGRAPHIC FABRICATION PROCESS USING NONDESTRUCTIVE TESTING AND RIGOROUS ELECTROMAGNETIC THEORY, Optik, 103(1), 1996, pp. 12-18

Authors: SHERIDAN JT SCHWIDER J STREIBL N HASELBECK S EISNER M HEISSMEIER M FALKENSTORFER O
Citation: Jt. Sheridan et al., MODELING AND MEASUREMENT OF MELTED MICROLENS SHAPES, Optik, 97(4), 1994, pp. 174-180

Authors: HEISSMEIER M SHERIDAN JT SCHWIDER J STREIBL N
Citation: M. Heissmeier et al., DETECTION OF ERRORS IN MICROLITHOGRAPHIC GRATING FABRICATION USING A SIMPLE METHODOLOGY, Optik, 95(4), 1994, pp. 161-167
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