Citation: M. Heissmeier et al., CALIBRATION OF A MICROLITHOGRAPHIC FABRICATION PROCESS USING NONDESTRUCTIVE TESTING AND RIGOROUS ELECTROMAGNETIC THEORY, Optik, 103(1), 1996, pp. 12-18
Authors:
HEISSMEIER M
SHERIDAN JT
SCHWIDER J
STREIBL N
Citation: M. Heissmeier et al., DETECTION OF ERRORS IN MICROLITHOGRAPHIC GRATING FABRICATION USING A SIMPLE METHODOLOGY, Optik, 95(4), 1994, pp. 161-167