Authors: STINE BE OUMA DO DIVECHA RR BONING DS CHUNG JE HETHERINGTON DL HARWOOD CR NAKAGAWA OS OH SY

Citation: Be. Stine et al., RAPID CHARACTERIZATION AND MODELING OF PATTERN-DEPENDENT VARIATION INCHEMICAL-MECHANICAL POLISHING, IEEE transactions on semiconductor manufacturing, 11(1), 1998, pp. 129-140

Authors: LIN SY FLEMING JG HETHERINGTON DL SMITH BK BISWAS R HO KM SIGALAS MM ZUBRZYCKI W KURTZ SR BUR J

Citation: Sy. Lin et al., A 3-DIMENSIONAL PHOTONIC CRYSTAL OPERATING AT INFRARED WAVELENGTHS, Nature, 394(6690), 1998, pp. 251-253

Authors: SHUL RJ LOVEJOY ML HETHERINGTON DL RIEGER DJ KLEM JF MELLOCH MR

Citation: Rj. Shul et al., PLASMA-INDUCED DAMAGE OF GAAS PN-JUNCTION DIODES USING ELECTRON-CYCLOTRON-RESONANCE GENERATED CL-2 AR, BCL3/AR, CL-2/BCL3/AR, AND SICL4/AR PLASMAS/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(1), 1995, pp. 27-33

Authors: SHANEYFELT MR WARREN WL HETHERINGTON DL TIMON RP RESNICK PJ WINOKUR PS

Citation: Mr. Shaneyfelt et al., DEFECT CENTERS IN CHEMICAL-MECHANICAL POLISHED MOS OXIDES, Microelectronic engineering, 28(1-4), 1995, pp. 71-74

Authors: SHANEYFELT MR WARREN WL HETHERINGTON DL WINOKUR PS REBER RA

Citation: Mr. Shaneyfelt et al., RADIATION-INDUCED DEFECTS IN CHEMICAL-MECHANICAL POLISHED MOS OXIDES, IEEE transactions on nuclear science, 42(6), 1995, pp. 1725-1730

Authors: SHUL RJ LOVEJOY ML HETHERINGTON DL RIEGER DJ VAWTER GA KLEM JF MELLOCH MR

Citation: Rj. Shul et al., INVESTIGATION OF PLASMA ETCH INDUCED DAMAGE IN COMPOUND SEMICONDUCTOR-DEVICES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1351-1355