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Results:
1-18
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Results: 18
Authors:
LIN LW
HOWE RT
PISANO AP
Citation: Lw. Lin et al., MICROELECTROMECHANICAL FILTERS FOR SIGNAL-PROCESSING, Journal of microelectromechanical systems, 7(3), 1998, pp. 286-294
Authors:
SRINIVASAN U
HOUSTON MR
HOWE RT
MABOUDIAN R
Citation: U. Srinivasan et al., ALKYLTRICHLOROSILANE-BASED SELF-ASSEMBLED MONOLAYER FILMS FOR STICTION REDUCTION IN SILICON MICROMACHINES, Journal of microelectromechanical systems, 7(2), 1998, pp. 252-260
Authors:
ALLEN JJ
KINNEY RD
SARSFIELD J
DAILY MR
ELLIS JR
SMITH JH
MONTAGUE S
HOWE RT
BOSER BE
HOROWITZ R
PISANO AP
LEMKIN MA
CLARK WA
JUNEAU T
Citation: Jj. Allen et al., INTEGRATED MICROELECTROMECHANICAL SENSOR DEVELOPMENT FOR INERTIAL APPLICATIONS, IEEE aerospace and electronic systems magazine, 13(11), 1998, pp. 36-40
Authors:
BUSTILLO JM
HOWE RT
MULLER RS
Citation: Jm. Bustillo et al., SURFACE MICROMACHINING FOR MICROELECTROMECHANICAL SYSTEMS, Proceedings of the IEEE, 86(8), 1998, pp. 1552-1574
Authors:
MABOUDIAN R
HOWE RT
Citation: R. Maboudian et Rt. Howe, CRITICAL-REVIEW - ADHESION IN SURFACE MICROMECHANICAL STRUCTURES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(1), 1997, pp. 1-20
Authors:
LIN LW
PISANO AP
HOWE RT
Citation: Lw. Lin et al., A MICRO STRAIN-GAUGE WITH MECHANICAL AMPLIFIER, Journal of microelectromechanical systems, 6(4), 1997, pp. 313-321
Authors:
HOUSTON MR
HOWE RT
MABOUDIAN R
Citation: Mr. Houston et al., EFFECT OF HYDROGEN TERMINATION ON THE WORK OF ADHESION BETWEEN ROUGH POLYCRYSTALLINE SILICON SURFACES, Journal of applied physics, 81(8), 1997, pp. 3474-3483
Authors:
FEDDER GK
HOWE RT
Citation: Gk. Fedder et Rt. Howe, MULTIMODE DIGITAL-CONTROL OF A SUSPENDED POLYSILICON MICROSTRUCTURE, Journal of microelectromechanical systems, 5(4), 1996, pp. 283-297
Authors:
HOWE RT
BOSER BE
PISANO AP
Citation: Rt. Howe et al., POLYSILICON INTEGRATED MICROSYSTEMS - TECHNOLOGIES AND APPLICATIONS, Sensors and actuators. A, Physical, 56(1-2), 1996, pp. 167-177
Authors:
CHAU KHL
LEWIS SR
ZHAO Y
HOWE RT
BART SF
MARCHESELLI RG
Citation: Khl. Chau et al., AN INTEGRATED FORCE-BALANCED CAPACITIVE ACCELEROMETER FOR LOW-G APPLICATIONS, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 472-476
Authors:
CHEUNG P
HOROWITZ R
HOWE RT
Citation: P. Cheung et al., DESIGN, FABRICATION, POSITION SENSING, AND CONTROL OF AN ELECTROSTATICALLY-DRIVEN POLYSILICON MICROACTUATOR, IEEE transactions on magnetics, 32(1), 1996, pp. 122-128
Authors:
BOSER BE
HOWE RT
Citation: Be. Boser et Rt. Howe, SURFACE MICROMACHINED ACCELEROMETERS, IEEE journal of solid-state circuits, 31(3), 1996, pp. 366-375
Authors:
CHO YH
KWAK BM
PISANO AP
HOWE RT
Citation: Yh. Cho et al., SLIDE FILM DAMPING IN LATERALLY DRIVEN MICROSTRUCTURES, Sensors and actuators. A, Physical, 40(1), 1994, pp. 31-39
Authors:
ALLEY RL
KOMVOPOULOS K
HOWE RT
Citation: Rl. Alley et al., SELF-ASSEMBLED MONOLAYER FILM FOR ENHANCED IMAGING OF ROUGH SURFACES WITH ATOMIC-FORCE MICROSCOPY, Journal of applied physics, 76(10), 1994, pp. 5731-5737
Authors:
MONK DJ
SOANE DS
HOWE RT
Citation: Dj. Monk et al., HYDROFLUORIC-ACID ETCHING OF SILICON DIOXIDE SACRIFICIAL LAYERS .1. EXPERIMENTAL-OBSERVATIONS, Journal of the Electrochemical Society, 141(1), 1994, pp. 264-269
Authors:
MONK DJ
SOANE DS
HOWE RT
Citation: Dj. Monk et al., HYDROFLUORIC-ACID ETCHING OF SILICON DIOXIDE SACRIFICIAL LAYERS .2. MODELING, Journal of the Electrochemical Society, 141(1), 1994, pp. 270-274
Authors:
MONK DJ
SOANE DS
HOWE RT
Citation: Dj. Monk et al., A REVIEW OF THE CHEMICAL-REACTION MECHANISM AND KINETICS FOR HYDROFLUORIC-ACID ETCHING OF SILICON DIOXIDE FOR SURFACE MICROMACHING APPLICATIONS, Thin solid films, 232(1), 1993, pp. 1-12
Authors:
MONK DJ
SOANE DS
HOWE RT
Citation: Dj. Monk et al., DETERMINATION OF THE ETCHING KINETICS FOR THE HYDROFLUORIC-ACID SILICON DIOXIDE SYSTEM, Journal of the Electrochemical Society, 140(8), 1993, pp. 2339-2346
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1-18
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