Authors:
Rothuizen, H
Drechsler, U
Genolet, G
Haberle, W
Lutwyche, M
Stutz, R
Widmer, R
Vettiger, P
Citation: H. Rothuizen et al., Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications, MICROEL ENG, 53(1-4), 2000, pp. 509-512