Authors:
Kim, SM
Kim, SJ
Bang, CJ
Ham, YM
Baik, KH
Citation: Sm. Kim et al., Optimization of dipole off-axis illumination by 1st-order efficiency method for sub-120 nm node with KrF lithography, JPN J A P 1, 39(12B), 2000, pp. 6777-6780
Authors:
Ham, YM
Baik, KH
Lee, WG
Chung, TD
Chun, K
Citation: Ym. Ham et al., Application of a new empirical model to the electron beam lithography process with chemically amplified resists, JPN J A P 1, 37(12B), 1998, pp. 6761-6766