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Results: 1-10 |
Results: 10
Direct determination of particle-particle interactions in a 2D plasma dustcrystal - art. no. 235001
Authors: Hebner, GA Riley, ME Johnson, DS Ho, P Buss, RJ
Citation: Ga. Hebner et al., Direct determination of particle-particle interactions in a 2D plasma dustcrystal - art. no. 235001, PHYS REV L, 8723(23), 2001, pp. 5001
Characterization of electron and negative ion densities in fluorocarbon containing inductively driven plasmas
Authors: Hebner, GA Abraham, IC
Citation: Ga. Hebner et Ic. Abraham, Characterization of electron and negative ion densities in fluorocarbon containing inductively driven plasmas, J APPL PHYS, 90(10), 2001, pp. 4929-4937
Spatially resolved SiF and SiF2 densities in inductively driven dischargescontaining C2F6 and C4F8
Authors: Hebner, GA
Citation: Ga. Hebner, Spatially resolved SiF and SiF2 densities in inductively driven dischargescontaining C2F6 and C4F8, J APPL PHYS, 90(10), 2001, pp. 4938-4945
CF, CF2, and SiF densities in inductively driven discharges containing C2F6, C4F8, and CHF3
Authors: Hebner, GA
Citation: Ga. Hebner, CF, CF2, and SiF densities in inductively driven discharges containing C2F6, C4F8, and CHF3, J APPL PHYS, 89(2), 2001, pp. 900-910
Behavior of excited argon atoms in inductively driven plasmas
Authors: Hebner, GA Miller, PA
Citation: Ga. Hebner et Pa. Miller, Behavior of excited argon atoms in inductively driven plasmas, J APPL PHYS, 87(12), 2000, pp. 8304-8315
Electron and negative ion densities in C2F6 and CHF3 containing inductively coupled discharges
Authors: Hebner, GA Miller, PA
Citation: Ga. Hebner et Pa. Miller, Electron and negative ion densities in C2F6 and CHF3 containing inductively coupled discharges, J APPL PHYS, 87(11), 2000, pp. 7660-7666
Surface dependent electron and negative ion density in inductively coupleddischarges
Authors: Hebner, GA Blain, MG Hamilton, TW Nichols, CA Jarecki, RL
Citation: Ga. Hebner et al., Surface dependent electron and negative ion density in inductively coupleddischarges, J VAC SCI A, 17(6), 1999, pp. 3172-3178
Influence of surface material on the boron chloride density in inductivelycoupled discharges
Authors: Hebner, GA Blain, MG Hamilton, TW
Citation: Ga. Hebner et al., Influence of surface material on the boron chloride density in inductivelycoupled discharges, J VAC SCI A, 17(6), 1999, pp. 3218-3224
Ion and neutral species in C2F6 and CHF3 dielectric etch discharges
Authors: Jayaraman, R McGrath, RT Hebner, GA
Citation: R. Jayaraman et al., Ion and neutral species in C2F6 and CHF3 dielectric etch discharges, J VAC SCI A, 17(4), 1999, pp. 1545-1551
Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge
Authors: Czarnetzki, U Hebner, GA Luggenholscher, D Dobele, HF Riley, ME
Citation: U. Czarnetzki et al., Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge, IEEE PLAS S, 27(1), 1999, pp. 70-71
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