Authors:
Hollander, B
Lenk, S
Mantl, S
Trinkaus, H
Kirch, D
Luysberg, M
Hackbarth, T
Herzog, HJ
Fichtner, PFP
Citation: B. Hollander et al., Strain relaxation of pseudomorphic Si1-xGex/Si(100) heterostructures afterhydrogen or helium ion implantation for virtual substrate fabrication, NUCL INST B, 175, 2001, pp. 357-367
Authors:
Wohl, G
Dudek, V
Graf, M
Kibbel, H
Herzog, HJ
Klose, M
Citation: G. Wohl et al., Relaxed Si0.7Ge0.3 buffer layers grown on patterned silicon substrates forSiGe n-channel HMOSFETs, THIN SOL FI, 369(1-2), 2000, pp. 175-181
Authors:
Hock, G
Kohn, E
Rosenblad, C
von Kanel, H
Herzog, HJ
Konig, U
Citation: G. Hock et al., High hole mobility in Si0.17Ge0.83 channel metal-oxide-semiconductor field-effect transistors grown by plasma-enhanced chemical vapor deposition, APPL PHYS L, 76(26), 2000, pp. 3920-3922
Authors:
Trinkaus, H
Hollander, B
Rongen, S
Mantl, S
Herzog, HJ
Kuchenbecker, J
Hackbarth, T
Citation: H. Trinkaus et al., Strain relaxation mechanism for hydrogen-implanted Si1-xGex/Si(100) heterostructures, APPL PHYS L, 76(24), 2000, pp. 3552-3554
Authors:
Hollander, B
Mantl, S
Liedtke, R
Mesters, S
Herzog, HJ
Kibbel, H
Hackbarth, T
Citation: B. Hollander et al., Enhanced strain relaxation of epitaxial SiGe layers on Si(100) after H+ ion implantation, NUCL INST B, 148(1-4), 1999, pp. 200-210
Authors:
Mantl, S
Hollander, B
Liedtke, R
Mesters, S
Herzog, HJ
Kibbel, H
Hackbarth, T
Citation: S. Mantl et al., Strain relaxation of epitaxial SiGe layers on Si(100) improved by hydrogenimplantation, NUCL INST B, 147(1-4), 1999, pp. 29-34
Authors:
Weller, J
Jorke, H
Strohm, K
Luy, JF
Kibbel, H
Herzog, HJ
Sauer, R
Citation: J. Weller et al., Assessment of transport parameters for the design of high speed Si/SiGe HBTs with compositionally graded base, THIN SOL FI, 336(1-2), 1998, pp. 137-140
Authors:
Hock, G
Gluck, M
Hackbarth, T
Herzog, HJ
Kohn, E
Citation: G. Hock et al., Carrier mobilities in modulation doped Si1-xGex heterostructures with respect to FET applications, THIN SOL FI, 336(1-2), 1998, pp. 141-144