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Results:
1-8
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Results: 8
Authors:
Muller, L
Pisano, AP
Howe, RT
Citation: L. Muller et al., Microgimbal torsion beam design using open, thin-walled cross sections, J MICROEL S, 10(4), 2001, pp. 550-560
Authors:
Srinivasan, U
Liepmann, D
Howe, RT
Citation: U. Srinivasan et al., Microstructure to substrate self-assembly using capillary forces, J MICROEL S, 10(1), 2001, pp. 17-24
Authors:
Muller, L
Howe, RT
Pisano, AP
Citation: L. Muller et al., High-aspect-ratio, molded microstructures with electrical isolation and embedded interconnects, MICROSYST T, 7(2), 2001, pp. 47-54
Authors:
Ashurst, WR
Yau, C
Carraro, C
Lee, C
Kluth, GJ
Howe, RT
Maboudian, R
Citation: Wr. Ashurst et al., Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS, SENS ACTU-A, 91(3), 2001, pp. 239-248
Authors:
Franke, AE
King, TJ
Howe, RT
Citation: Ae. Franke et al., Integrated MEMS technologies, MRS BULL, 26(4), 2001, pp. 291-295
Authors:
Singh, A
Horsley, DA
Cohn, MB
Pisano, AP
Howe, RT
Citation: A. Singh et al., Batch transfer of microstructures using flip-chip solder bonding, J MICROEL S, 8(1), 1999, pp. 27-33
Authors:
Nguyen, CTC
Howe, RT
Citation: Ctc. Nguyen et Rt. Howe, An integrated CMOS micromechanical resonator high-Q oscillator, IEEE J SOLI, 34(4), 1999, pp. 440-455
Authors:
Juneau, TN
Clark, WA
Pisano, AP
Howe, RT
Citation: Tn. Juneau et al., Micromachined rate gyroscopes, MICROENGINEERING AEROSPACE SYSTEMS, 1999, pp. 347-387
Risultati:
1-8
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