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Results: 1-25 | 26-26
Results: 1-25/26
A PROBABILISTIC APPROACH TO RUN-TO-RUN CONTROL
Authors: HAMBY ES KABAMBA PT KHARGONEKAR PP
Citation: Es. Hamby et al., A PROBABILISTIC APPROACH TO RUN-TO-RUN CONTROL, IEEE transactions on semiconductor manufacturing, 11(4), 1998, pp. 654-669
STABILITY ANALYSIS OF A MISSILE CONTROL-SYSTEM WITH A DYNAMIC INVERSION CONTROLLER
Authors: SCHUMACHER C KHARGONEKAR PP
Citation: C. Schumacher et Pp. Khargonekar, STABILITY ANALYSIS OF A MISSILE CONTROL-SYSTEM WITH A DYNAMIC INVERSION CONTROLLER, Journal of guidance, control, and dynamics, 21(3), 1998, pp. 508-515
MISSILE AUTOPILOT DESIGNS USING H-INFINITY CONTROL WITH GAIN SCHEDULING AND DYNAMIC INVERSION
Authors: SCHUMACHER C KHARGONEKAR PP
Citation: C. Schumacher et Pp. Khargonekar, MISSILE AUTOPILOT DESIGNS USING H-INFINITY CONTROL WITH GAIN SCHEDULING AND DYNAMIC INVERSION, Journal of guidance, control, and dynamics, 21(2), 1998, pp. 234-243
A NEW ALGORITHM FOR REAL-TIME THIN-FILM THICKNESS ESTIMATION GIVEN IN-SITU MULTIWAVELENGTH ELLIPSOMETRY USING AN EXTENDED KALMAN FILTER
Authors: GALARZA CG KHARGONEKAR PP LAYADI N VINCENT TL RIETMAN EA LEE JTC
Citation: Cg. Galarza et al., A NEW ALGORITHM FOR REAL-TIME THIN-FILM THICKNESS ESTIMATION GIVEN IN-SITU MULTIWAVELENGTH ELLIPSOMETRY USING AN EXTENDED KALMAN FILTER, Thin solid films, 313, 1998, pp. 156-160
AN EXTENDED KALMAN FILTERING-BASED METHOD OF PROCESSING REFLECTOMETRYDATA FOR FAST IN-SITU ETCH RATE MEASUREMENTS
Authors: VINCENT TL KHARGONEKAR PP TERRY FL
Citation: Tl. Vincent et al., AN EXTENDED KALMAN FILTERING-BASED METHOD OF PROCESSING REFLECTOMETRYDATA FOR FAST IN-SITU ETCH RATE MEASUREMENTS, IEEE transactions on semiconductor manufacturing, 10(1), 1997, pp. 42-51
INTEGRATED REAL-TIME AND RUN-TO-RUN CONTROL OF ETCH DEPTH IN REACTIVEION ETCHING
Authors: HANKINSON M VINCENT T IRANI KB KHARGONEKAR PP
Citation: M. Hankinson et al., INTEGRATED REAL-TIME AND RUN-TO-RUN CONTROL OF ETCH DEPTH IN REACTIVEION ETCHING, IEEE transactions on semiconductor manufacturing, 10(1), 1997, pp. 121-130
REDUCTION OF LOADING EFFECT IN REACTIVE ION ETCHING USING REAL-TIME CLOSED-LOOP CONTROL
Authors: PATTERSON OD KHARGONEKAR PP
Citation: Od. Patterson et Pp. Khargonekar, REDUCTION OF LOADING EFFECT IN REACTIVE ION ETCHING USING REAL-TIME CLOSED-LOOP CONTROL, Journal of the Electrochemical Society, 144(8), 1997, pp. 2865-2871
END-POINT AND ETCH RATE CONTROL USING DUAL-WAVELENGTH LASER REFLECTOMETRY WITH A NONLINEAR ESTIMATOR
Authors: VINCENT TL KHARGONEKAR PP TERRY FL
Citation: Tl. Vincent et al., END-POINT AND ETCH RATE CONTROL USING DUAL-WAVELENGTH LASER REFLECTOMETRY WITH A NONLINEAR ESTIMATOR, Journal of the Electrochemical Society, 144(7), 1997, pp. 2467-2472
COMBINED REAL-TIME AND RUN-TO-RUN CONTROL OF ETCH DEPTH AND SPATIAL UNIFORMITY IN PLASMA-ETCHING
Authors: HANKINSON M VINCENT TL IRANI K KHARGONEKAR PP
Citation: M. Hankinson et al., COMBINED REAL-TIME AND RUN-TO-RUN CONTROL OF ETCH DEPTH AND SPATIAL UNIFORMITY IN PLASMA-ETCHING, Journal of the Electrochemical Society, 144(7), 1997, pp. 2473-2479
SENSOR SYSTEMS FOR REAL-TIME FEEDBACK-CONTROL OF REACTIVE ION ETCHING
Authors: BENSON TE KAMLET LI RUEGSEGGER SM HANISH CK HANISH PD RASHAP BA KLIMECKY P FREUDENBERG JS GRIZZLE JW KHARGONEKAR PP TERRY FL BARNEY B
Citation: Te. Benson et al., SENSOR SYSTEMS FOR REAL-TIME FEEDBACK-CONTROL OF REACTIVE ION ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(1), 1996, pp. 483-488
REDUCING AUTOMOTIVE ENGINE SPEED FLUCTUATION AT IDLE
Authors: SHIM D PARK J KHARGONEKAR PP RIBBENS WB
Citation: D. Shim et al., REDUCING AUTOMOTIVE ENGINE SPEED FLUCTUATION AT IDLE, IEEE transactions on control systems technology, 4(4), 1996, pp. 404-410
FREQUENCY-RESPONSE OF SAMPLED-DATA SYSTEMS
Authors: YAMAMOTO Y KHARGONEKAR PP
Citation: Y. Yamamoto et Pp. Khargonekar, FREQUENCY-RESPONSE OF SAMPLED-DATA SYSTEMS, IEEE transactions on automatic control, 41(2), 1996, pp. 166-176
APPLICATION OF IDENTIFICATION IN H-INFINITY TO LIGHTLY DAMPED SYSTEMS- 2 CASE-STUDIES
Authors: FRIEDMAN JH KHARGONEKAR PP
Citation: Jh. Friedman et Pp. Khargonekar, APPLICATION OF IDENTIFICATION IN H-INFINITY TO LIGHTLY DAMPED SYSTEMS- 2 CASE-STUDIES, IEEE transactions on control systems technology, 3(3), 1995, pp. 279-289
CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT - REAL-TIME FEEDBACK-CONTROL OF A REACTIVE ION ETCHER
Authors: RASHAP BA ELTA ME ETEMAD H FOURNIER JP FREUDENBERG JS GILES MD GRIZZLE JW KABAMBA PT KHARGONEKAR PP LAFORTUNE S MOYNE JR TENEKETZIS D TERRY FL
Citation: Ba. Rashap et al., CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT - REAL-TIME FEEDBACK-CONTROL OF A REACTIVE ION ETCHER, IEEE transactions on semiconductor manufacturing, 8(3), 1995, pp. 286-297
GENERALIZATION IN MIXED H-2 H-INFINITY CONTROL WITH STATE-FEEDBACK/
Authors: NOBUYAMA E KHARGONEKAR PP
Citation: E. Nobuyama et Pp. Khargonekar, GENERALIZATION IN MIXED H-2 H-INFINITY CONTROL WITH STATE-FEEDBACK/, Systems & control letters, 25(4), 1995, pp. 289-293
ROBUST REGULATION IN THE PRESENCE OF NORM-BOUNDED UNCERTAINTY
Authors: ABEDOR J NAGPAL K KHARGONEKAR PP POOLLA K
Citation: J. Abedor et al., ROBUST REGULATION IN THE PRESENCE OF NORM-BOUNDED UNCERTAINTY, IEEE transactions on automatic control, 40(1), 1995, pp. 147-153
A VELOCITY ALGORITHM FOR THE IMPLEMENTATION OF GAIN-SCHEDULED CONTROLLERS
Authors: KAMINER I PASCOAL AM KHARGONEKAR PP COLEMAN EE
Citation: I. Kaminer et al., A VELOCITY ALGORITHM FOR THE IMPLEMENTATION OF GAIN-SCHEDULED CONTROLLERS, Automatica, 31(8), 1995, pp. 1185-1191
WORST-CASE AND AVERAGE H-2 PERFORMANCE ANALYSIS AGAINST REAL CONSTANTPARAMETRIC UNCERTAINTY
Authors: FRIEDMAN JH KABAMBA PT KHARGONEKAR PP
Citation: Jh. Friedman et al., WORST-CASE AND AVERAGE H-2 PERFORMANCE ANALYSIS AGAINST REAL CONSTANTPARAMETRIC UNCERTAINTY, Automatica, 31(4), 1995, pp. 649-657
ROBUST PERFORMANCE OF SYSTEMS WITH STRUCTURED UNCERTAINTIES IN STATE-SPACE
Authors: ZHOU K KHARGONEKAR PP STOUSTRUP J NIEMANN HH
Citation: K. Zhou et al., ROBUST PERFORMANCE OF SYSTEMS WITH STRUCTURED UNCERTAINTIES IN STATE-SPACE, Automatica, 31(2), 1995, pp. 249-255
CHARACTERIZATION OF THE L2-INDUCED NORM FOR LINEAR-SYSTEMS WITH JUMPSWITH APPLICATIONS TO SAMPLED-DATA SYSTEMS
Authors: SIVASHANKAR N KHARGONEKAR PP
Citation: N. Sivashankar et Pp. Khargonekar, CHARACTERIZATION OF THE L2-INDUCED NORM FOR LINEAR-SYSTEMS WITH JUMPSWITH APPLICATIONS TO SAMPLED-DATA SYSTEMS, SIAM journal on control and optimization, 32(4), 1994, pp. 1128-1150
ON A LIFTING THEOREM FOR THE STRUCTURED SINGULAR-VALUE
Authors: BERCOVICI H FOIAS G KHARGONEKAR PP TANNENBAUM A
Citation: H. Bercovici et al., ON A LIFTING THEOREM FOR THE STRUCTURED SINGULAR-VALUE, Journal of mathematical analysis and applications, 187(2), 1994, pp. 617-627
DECENTRALIZED CONTROL AND PERIODIC FEEDBACK
Authors: KHARGONEKAR PP OZGULER AB
Citation: Pp. Khargonekar et Ab. Ozguler, DECENTRALIZED CONTROL AND PERIODIC FEEDBACK, IEEE transactions on automatic control, 39(4), 1994, pp. 877-882
SOLUTION TO THE POSITIVE REAL CONTROL PROBLEM FOR LINEAR TIME-INVARIANT SYSTEMS
Authors: SUN WQ KHARGONEKAR PP SHIM DS
Citation: Wq. Sun et al., SOLUTION TO THE POSITIVE REAL CONTROL PROBLEM FOR LINEAR TIME-INVARIANT SYSTEMS, IEEE transactions on automatic control, 39(10), 1994, pp. 2034-2046
OPTIMAL CONTROLLER SYNTHESIS WITH D-STABILITY
Authors: SIVASHANKAR N KAMINER I KHARGONEKAR PP
Citation: N. Sivashankar et al., OPTIMAL CONTROLLER SYNTHESIS WITH D-STABILITY, Automatica, 30(6), 1994, pp. 1003-1008
H-INFINITY CONTROL AND FILTERING FOR SAMPLED-DATA SYSTEMS
Authors: SUN WQ NAGPAL KM KHARGONEKAR PP
Citation: Wq. Sun et al., H-INFINITY CONTROL AND FILTERING FOR SAMPLED-DATA SYSTEMS, IEEE transactions on automatic control, 38(8), 1993, pp. 1162-1175
Risultati: 1-25 | 26-26