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Results: 26-50/57
Authors:
HAMPDENSMITH MJ
KODAS TT
Citation: Mj. Hampdensmith et Tt. Kodas, CHEMICAL-VAPOR-DEPOSITION OF METALS .2. OVERVIEW OF SELECTIVE CVD OF METALS, CHEMICAL VAPOR DEPOSITION, 1(2), 1995, pp. 39-48
Authors:
HAMPDENSMITH MJ
KODAS TT
Citation: Mj. Hampdensmith et Tt. Kodas, CHEMICAL-VAPOR-DEPOSITION OF METALS .1. AN OVERVIEW OF CVD PROCESSES, CHEMICAL VAPOR DEPOSITION, 1(1), 1995, pp. 8-23
Authors:
HAMPDENSMITH MJ
KODAS TT
Citation: Mj. Hampdensmith et Tt. Kodas, CHEMICAL-VAPOR-DEPOSITION OF METALS .1. AN OVERVIEW OF CVD PROCESSES, Advanced materials, 7(7), 1995, pp. 8-23
Authors:
XU CY
HAMPDENSMITH MJ
KODAS TT
Citation: Cy. Xu et al., AEROSOL-ASSISTED CHEMICAL-VAPOR-DEPOSITION (AACVD) OF BINARY ALLOY (AGXPD1-X, CUXPD1-X, AGXCU1-X) FILMS AND STUDIES OF THEIR COMPOSITIONAL VARIATION, Chemistry of materials, 7(8), 1995, pp. 1539-1546
Authors:
GURAV AS
KODAS TT
JOUTSENSAARI J
KAUPPINEN EI
ZILLIACUS R
Citation: As. Gurav et al., GAS-PHASE PARTICLE-SIZE DISTRIBUTIONS AND LEAD LOSS DURING SPRAY-PYROLYSIS OF (BI,PB)-SR-CA-CU-O, Journal of materials research, 10(7), 1995, pp. 1644-1652
Authors:
PLUYM TC
KODAS TT
WANG LM
GLICKSMAN HD
Citation: Tc. Pluym et al., SILVER-PALLADIUM ALLOY PARTICLE-PRODUCTION BY SPRAY-PYROLYSIS, Journal of materials research, 10(7), 1995, pp. 1661-1673
Authors:
HAMPDENSMITH MJ
KODAS TT
Citation: Mj. Hampdensmith et Tt. Kodas, CHEMICAL-VAPOR-DEPOSITION OF COPPER FROM (HFAC)CUL COMPOUNDS, Polyhedron, 14(6), 1995, pp. 699-732
Authors:
JAIN A
KODAS TT
HAMPDENSMITH MJ
Citation: A. Jain et al., THERMAL DRY-ETCHING OF COPPER USING HYDROGEN-PEROXIDE AND HEXAFLUOROACETYLACETONE, Thin solid films, 269(1-2), 1995, pp. 51-56
Authors:
PERRY WL
JAIN A
KODAS TT
HAMPDENSMITH MJ
Citation: Wl. Perry et al., SELECTIVE CHEMICAL-VAPOR-DEPOSITION ON EXCIMER-LASER-PATTERNED POLYTETRAFLUOROETHYLENE FROM HEXAFLUOROACETYLACETONATE COPPER(I) VINYLTRIMETHYLSILANE, Thin solid films, 262(1-2), 1995, pp. 7-11
Authors:
JAIN A
GELATOS AV
KODAS TT
HAMPDENSMITH MJ
MARSH R
MOGAB CJ
Citation: A. Jain et al., SELECTIVE CHEMICAL-VAPOR-DEPOSITION OF COPPER USING (HFAC) COPPER(I) VINYLTRIMETHYLSILANE IN THE ABSENCE AND PRESENCE OF WATER, Thin solid films, 262(1-2), 1995, pp. 52-59
Authors:
XU CY
HAMPDENSMITH MJ
KODAS TT
DUESLER EN
RHEINGOLD AL
YAP G
Citation: Cy. Xu et al., SYNTHESIS AND STRUCTURE DETERMINATION OF (HFAC)AG(SET(2)), PD(HFAC-C)(HFAC-O,O)(SET(2)), AND [(HFAC)AG](4)(SET(2)) - LIGAND-EXCHANGE REACTIONS RELEVANT TO AEROSOL-ASSISTED CHEMICAL-VAPOR-DEPOSITION (AACVD) OF AG1-XPDX FILMS, Inorganic chemistry, 34(19), 1995, pp. 4767-4773
Authors:
XIONG Y
LYONS SW
KODAS TT
PRATSINIS SE
Citation: Y. Xiong et al., VOLATILE METAL-OXIDE EVAPORATION DURING AEROSOL DECOMPOSITION, Journal of the American Ceramic Society, 78(9), 1995, pp. 2490-2496
Authors:
SENZAKI Y
CARUSO J
HAMPDENSMITH MJ
KODAS TT
WANG LM
Citation: Y. Senzaki et al., PREPARATION OF STRONTIUM FERRITE PARTICLES BY SPRAY-PYROLYSIS, Journal of the American Ceramic Society, 78(11), 1995, pp. 2973-2976
Authors:
SENZAKI Y
HAMPDENSMITH MJ
KODAS TT
HUSSLER JW
Citation: Y. Senzaki et al., PREPARATION OF METAL RUTHENATES BY SPRAY-PYROLYSIS, Journal of the American Ceramic Society, 78(11), 1995, pp. 2977-2983
Authors:
XU CY
HAMPDENSMITH MJ
KODAS TT
Citation: Cy. Xu et al., AEROSOL-ASSISTED CHEMICAL-VAPOR-DEPOSITION (AACVD) OF SILVER, PALLADIUM AND METAL ALLOY (AG1-XPDX, AG1-XCUX AND PD1-XCUX) FILMS, Advanced materials, 6(10), 1994, pp. 746-748
Authors:
XU CY
CORBITT TS
HAMPDENSMITH MJ
KODAS TT
DUESLER EN
Citation: Cy. Xu et al., SYNTHESIS AND CHARACTERIZATION OF LEWIS-BASE ADDUCTS OF 1,1,1,5,5,5-HEXAFLUOROACETYLACETONATOSILVER(I), Journal of the Chemical Society. Dalton transactions, (19), 1994, pp. 2841-2849
Authors:
FARKAS J
HAMPDENSMITH MJ
KODAS TT
Citation: J. Farkas et al., FTIR STUDIES OF THE ADSORPTION DESORPTION BEHAVIOR OF COPPER CHEMICAL-VAPOR-DEPOSITION PRECURSORS ON SILICA .1. (1,1,1,5,5,5-HEXAFLUOROACETYLACETONATO)COPPER(II)/, Journal of physical chemistry, 98(27), 1994, pp. 6753-6762
Authors:
FARKAS J
HAMPDENSMITH MJ
KODAS TT
Citation: J. Farkas et al., FTIR STUDIES OF THE ADSORPTION DESORPTION BEHAVIOR OF COPPER CHEMICAL-VAPOR-DEPOSITION PRECURSORS ON SILICA .2. 5,5-HEXAFLUOROACETYLACETONATO)(2-BUTYNE)COPPER(I)/, Journal of physical chemistry, 98(27), 1994, pp. 6763-6770
Authors:
FARKAS J
HAMPDENSMITH MJ
KODAS TT
Citation: J. Farkas et al., FTIR STUDIES OF THE ADSORPTION DESORPTION BEHAVIOR OF CU CHEMICAL-VAPOR-DEPOSITION PRECURSORS ON SILICA .3. REEXAMINATION OF ROACETYLACETONATO)(VINYLTRIMETHYLSILANE)COPPER(I), (HFAC)CU(VTMS)/, Journal of the Electrochemical Society, 141(12), 1994, pp. 3539-3546
Authors:
FARKAS J
HAMPDENSMITH MJ
KODAS TT
Citation: J. Farkas et al., FTIR STUDIES OF THE ADSORPTION DESORPTION BEHAVIOR OF CU CHEMICAL-VAPOR-DEPOSITION PRECURSORS ON SILICA .4. INTERACTION OF 5,5-HEXAFLUOROACETYLACETONATO)(2-BUTYNE)COPPER(I), (HFAC)CU(2-BUTYNE) AND ROACETYLACETONATO)(VINYLTRIMETHYLSILANE)COPPER(I), (HFAC)CU(VTMS) WITH PASSIVATED SILICA SURFACES AND COMPARISON TO SELECTIVE CVD OF CU/, Journal of the Electrochemical Society, 141(12), 1994, pp. 3547-3555
Authors:
GURAV AS
KODAS TT
WANG LM
KAUPPINEN EI
JOUTSENSAARI J
Citation: As. Gurav et al., GENERATION OF NANOMETER-SIZE FULLERENE PARTICLES VIA VAPOR CONDENSATION, Chemical physics letters, 218(4), 1994, pp. 304-308
Authors:
ROGER C
CORBITT TS
HAMPDENSMITH MJ
KODAS TT
Citation: C. Roger et al., AEROSOL-ASSISTED CHEMICAL-VAPOR-DEPOSITION OF COPPER - A LIQUID DELIVERY APPROACH TO METAL THIN-FILMS, Applied physics letters, 65(8), 1994, pp. 1021-1023
Authors:
JAIN A
KODAS TT
JAIRATH R
HAMPDENSMITH MJ
Citation: A. Jain et al., SELECTIVE AND BLANKET COPPER CHEMICAL-VAPOR-DEPOSITION FOR ULTRA-LARGE-SCALE INTEGRATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2107-2113
Authors:
CHANDLER CD
POWELL Q
HAMPDENSMITH MJ
KODAS TT
Citation: Cd. Chandler et al., GENERATION OF METAL TITANATE POWDERS BY SPRAY-PYROLYSIS USING SINGLE-SOURCE PRECURSORS, Journal of materials chemistry, 3(7), 1993, pp. 775-776
Authors:
HAMPDENSMITH MJ
KODAS TT
Citation: Mj. Hampdensmith et Tt. Kodas, COPPER ETCHING - NEW CHEMICAL APPROACHES, MRS bulletin, 18(6), 1993, pp. 39-45