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Results: 5

Authors: TURCU ICE ALLOT RM MANN CM REEVES C ROSS IN LISI N MADDISON BJ MOON SW PREWETT P STEVENSON JTM ROSS AWS GUNDLACH AM KOEK B MITCHELL P ANASTASI P MCCOARD C KIM NS
Citation: Ice. Turcu et al., X-RAY MICROFABRICATION AND NANOFABRICATION USING A LASER-PLASMA SOURCE AT 1 NM WAVELENGTH, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2495-2502

Authors: TURCU ICE REEVES CM STEVENSON JTM ROSS AWS GUNDLACH AM PREWETT P ANASTASI P KOEK B MITCHELL P LAKE P
Citation: Ice. Turcu et al., 180NM X-RAY-LITHOGRAPHY WITH A HIGH-REPETITION-RATE LASER-PLASMA SOURCE, Microelectronic engineering, 27(1-4), 1995, pp. 295-298

Authors: WEBER JP STOLTZ B DASLER M KOEK B
Citation: Jp. Weber et al., 4-CHANNEL TUNABLE OPTICAL NOTCH FILTER USING INGAASP INP REFLECTION GRATINGS/, IEEE photonics technology letters, 6(1), 1994, pp. 77-79

Authors: KOEK B JENNINGS B GRANT R
Citation: B. Koek et al., PATTERNING ISSUES OF 256MB DYNAMIC RANDOM-ACCESS MEMORY X-RAY MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2876-2880

Authors: KOEK B GRANT R HAAS L JENNINGS B WALLMAN B
Citation: B. Koek et al., MEETING THE PATTERN DEFINITION CHALLENGE OF 256MBIT DRAM X-RAY MASKS, Microelectronic engineering, 21(1-4), 1993, pp. 153-158
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