Authors:
TURCU ICE
ALLOT RM
MANN CM
REEVES C
ROSS IN
LISI N
MADDISON BJ
MOON SW
PREWETT P
STEVENSON JTM
ROSS AWS
GUNDLACH AM
KOEK B
MITCHELL P
ANASTASI P
MCCOARD C
KIM NS
Citation: Ice. Turcu et al., X-RAY MICROFABRICATION AND NANOFABRICATION USING A LASER-PLASMA SOURCE AT 1 NM WAVELENGTH, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2495-2502
Authors:
TURCU ICE
REEVES CM
STEVENSON JTM
ROSS AWS
GUNDLACH AM
PREWETT P
ANASTASI P
KOEK B
MITCHELL P
LAKE P
Citation: Ice. Turcu et al., 180NM X-RAY-LITHOGRAPHY WITH A HIGH-REPETITION-RATE LASER-PLASMA SOURCE, Microelectronic engineering, 27(1-4), 1995, pp. 295-298
Citation: B. Koek et al., PATTERNING ISSUES OF 256MB DYNAMIC RANDOM-ACCESS MEMORY X-RAY MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2876-2880
Authors:
KOEK B
GRANT R
HAAS L
JENNINGS B
WALLMAN B
Citation: B. Koek et al., MEETING THE PATTERN DEFINITION CHALLENGE OF 256MBIT DRAM X-RAY MASKS, Microelectronic engineering, 21(1-4), 1993, pp. 153-158