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Authors: KOSTELAK RL RAAB EL VAIDYA S

Citation: Rl. Kostelak et al., IMPACT OF LENS ABERRATIONS ON PHASE-SHIFTING MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3793-3798

Authors: GAROFALO J BIDDICK CJ KOSTELAK RL VAIDYA S

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Authors: KOSTELAK RL PIERRAT C GAROFALO JG VAIDYA S

Citation: Rl. Kostelak et al., PRINTING OF PHASE-SHIFTING MASK DEFECTS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2705-2713