Authors:
KOURTEV J
GROUDEVAZOTOVA S
GARNEV I
ORLINOV V
Citation: J. Kourtev et al., UNBALANCED PLANAR MAGNETRON WITH CONTINUOUS CONTROL OF THE OPERATING MODE FROM TYPE-I TO TYPE-II, Vacuum, 47(11), 1996, pp. 1395-1397
Citation: J. Kourtev et R. Pascova, REACTIVELY MAGNETRON-SPUTTERED TI-AL-N THIN-FILMS WITH ENHANCED MECHANICAL-PROPERTIES, Vacuum, 47(10), 1996, pp. 1197-1201