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Results: 1-5 |
Results: 5

Authors: TORII K KAWAKAMI H MIKI H KUSHIDA K ITOGA T GOTO Y KUMIHASHI T YOKOYAMA N MONIWA M SHOJI K KAGA T FUJISAKI Y
Citation: K. Torii et al., PROCESS AND PROPERTIES OF PT PB(ZR,TI)O-3/PT INTEGRATED FERROELECTRICCAPACITORS/, Integrated ferroelectrics, 16(1-4), 1997, pp. 21-28

Authors: KOFUJI N TSUJIMOTO K KUMIHASHI T TACHI S
Citation: N. Kofuji et al., REDUCTION IN MICROLOADING BY HIGH-GAS-FLOW-RATE ELECTRON-CYCLOTRON-RESONANCE PLASMA-ETCHING, JPN J A P 1, 34(5A), 1995, pp. 2489-2494

Authors: IZAWA M KUMIHASHI T
Citation: M. Izawa et T. Kumihashi, SURFACE MIGRATION AS A DETERMINATE FACTOR OF THE STICKING COEFFICIENTDERIVED FROM THE CHEMISORPTION MODEL, The Journal of chemical physics, 103(21), 1995, pp. 9418-9425

Authors: TSUJIMOTO K KUMIHASHI T KOFUJI N TACHI S
Citation: K. Tsujimoto et al., SHORT-GAS-RESIDENCE-TIME ELECTRON-CYCLOTRON-RESONANCE PLASMA-ETCHING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1209-1215

Authors: TSUJIMOTO K KUMIHASHI T TACHI S
Citation: K. Tsujimoto et al., NOVEL SHORT-GAS-RESIDENCE-TIME ELECTRON-CYCLOTRON-RESONANCE PLASMA-ETCHING, Applied physics letters, 63(14), 1993, pp. 1915-1917
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