Authors: Aoi, Y Ono, K Sakurada, K Kamijo, E Sasaki, M Sakayama, K

Citation: Y. Aoi et al., Effects of heat treatment on structure of amorphous CNx thin films by pulsed laser deposition, THIN SOL FI, 389(1-2), 2001, pp. 62-67

Authors: Aoi, Y Tani, Y Tamaoka, K Hirahara, T Hisa, M Kamijo, E

Citation: Y. Aoi et al., Synthesis of crystalline carbon nitride thin films by electron cyclotron resonance (ECR) sputtering method, NEW DIAM FR, 10(4), 2000, pp. 213-223

Authors: Muramatsu, Y Tani, Y Aoi, Y Kamijo, E Kaneyoshi, T Motoyama, M Delaunay, JJ Hayashi, T Grush, MM Callcott, TA Ederer, DL Heske, C Underwood, JH Perera, RCC

Citation: Y. Muramatsu et al., High-resolution soft X-ray emission spectra of crystalline carbon nitride films deposited by electron cyclotron resonance sputtering, JPN J A P 1, 38(9A), 1999, pp. 5143-5147

Authors: Tani, Y Aoi, Y Kamijo, E

Citation: Y. Tani et al., Chemical and structural analysis of crystalline carbon nitride thin films prepared by electron cyclotron resonance plasma sputtering process, J PHYS IV, 9(P8), 1999, pp. 1131-1137

Authors: Hubler, R Tentardini, EK Blando, E Teixeira, SR Vasconcellos, MZ Soraes, M Kamijo, E Fujiwara, M

Citation: R. Hubler et al., The energy dependence on microstructure of (Ti-Al-V) nitrides deposited bydual ion beam sputtering, SURF COAT, 119, 1999, pp. 969-972

Authors: Aoi, Y Ono, K Kamijo, E

Citation: Y. Aoi et al., Preparation of amorphous CNx thin films by pulsed laser deposition using aradio frequency radical beam source, J APPL PHYS, 86(4), 1999, pp. 2318-2322