Citation: Cs. Oh et al., Etch characteristics of CeO2 thin films as a buffer layer for the application of ferroelectric random access memory, J VAC SCI A, 19(4), 2001, pp. 1068-1071
Citation: Dp. Kim et Ci. Kim, Etching properties of SrBi2Ta2O9 thin films using CF4/Ar magnetically enhanced inductively coupled plasmas for FRAM, J KOR PHYS, 39(1), 2001, pp. 189-192
Citation: Dp. Kim et Ci. Kim, The etching characteristics of SrBi2Ta2O9 thin film in CF4/Ar plasma usingmagnetically enhanced inductively coupled plasma, THIN SOL FI, 385(1-2), 2001, pp. 162-166
Authors:
Kim, SC
Ahn, TY
Choi, HK
Choi, NG
Chung, TG
Chung, WS
Hwang, TK
Hyun, JS
Jung, GW
Kim, CI
Kim, JJ
Kim, SW
Lee, CH
Lee, KS
Lee, WH
Min, KS
Moon, KH
Paick, JS
Park, KS
Park, NC
Park, YK
Seo, JK
Seo, KK
Shin, JS
Yoon, YR
Lee, WC
Citation: Sc. Kim et al., Multicenter study of the treatment of erectile dysfunction with transurethral alprostadil (MUSE) in Korea, INT J IMPOT, 12(2), 2000, pp. 97-101
Authors:
An, TH
Park, JY
Yeom, GY
Chang, EG
Kim, CI
Citation: Th. An et al., Effects of BCl3 addition on Ar/Cl-2 gas in inductively coupled plasmas forlead zirconate titanate etching (vol 18, pg 1373, 2000), J VAC SCI A, 18(6), 2000, pp. 3012-3013
Authors:
An, TH
Park, JY
Yeom, GY
Chang, EG
Kim, CI
Citation: Th. An et al., Effects of BCl3 addition on Ar/Cl-2 gas in inductively coupled plasmas forlead zirconate titanate etching, J VAC SCI A, 18(4), 2000, pp. 1373-1376
Authors:
Baek, KH
Yoon, YS
Park, JM
Kwon, KH
Kim, CI
Nam, KS
Citation: Kh. Baek et al., Corrosion at the grain boundary and a fluorine-related passivation layer on etched Al-Cu (1%) alloy surfaces, ETRI J, 21(3), 1999, pp. 16-21
Citation: Nh. Kim et al., A study on the suppression of etch residues by O-2 gas addition in dry etching of Pt film, J KOR PHYS, 35, 1999, pp. S806-S809
Authors:
Yoon, YS
Baek, KH
Park, JM
Kwon, KH
Kim, CI
Hwang, IG
Citation: Ys. Yoon et al., Angle-resolved XPS investigation of the fluorine-related passivation layeron etched Al (Cu 1%) surface after SF6 treatment, J KOR PHYS, 34, 1999, pp. S305-S309