Authors:
Kikuchi, N
Kusano, E
Kishio, E
Kinbara, A
Nanto, H
Citation: N. Kikuchi et al., Effects of excess oxygen introduced during sputter deposition on carrier mobility in as-deposited and postannealed indium-tin-oxide films, J VAC SCI A, 19(4), 2001, pp. 1636-1641
Authors:
Nanto, H
Yokoi, Y
Mukai, T
Fujioka, J
Kusano, E
Kinbara, A
Douguchi, Y
Citation: H. Nanto et al., Novel gas sensor using polymer-film-coated quartz resonator for environmental monitoring, MAT SCI E C, 12(1-2), 2000, pp. 43-48
Authors:
Kikuchi, N
Kitagawa, M
Sato, A
Kusano, E
Nanto, H
Kinbara, A
Citation: N. Kikuchi et al., Elastic and plastic energies in sputtered multilayered Ti-TiN films estimated by nanoindentation, SURF COAT, 126(2-3), 2000, pp. 131-135
Authors:
Fukushima, K
Kusano, E
Kikuchi, N
Saito, T
Saiki, S
Nanto, H
Kinbara, A
Citation: K. Fukushima et al., Ion fraction and energy distribution of Ti flux incident to substrate surface in RF-plasma enhanced magnetron sputtering, VACUUM, 59(2-3), 2000, pp. 586-593
Citation: E. Kusano et A. Kinbara, Time-dependent O-2 mass balance change and target surface oxidation duringmode transition in Ti-O-2 reactive sputtering, J APPL PHYS, 87(4), 2000, pp. 2015-2019
Authors:
Kusano, E
Saitoh, T
Kobayashi, T
Fukushima, K
Kikuchi, N
Nanto, H
Kinbara, A
Citation: E. Kusano et al., Effect of coil-dc potential on ion energy distribution measured by an energy-resolved mass spectrometer in ionized physical vapor deposition, J VAC SCI A, 17(4), 1999, pp. 2360-2363
Authors:
Sakamoto, M
Kinbara, A
Yagi, T
Takahashi, M
Yamaguchi, K
Mino, T
Watanabe, S
Fujita, T
Citation: M. Sakamoto et al., Photochemical reaction of bis-aromatic systems: a novel photocycloadditionof pyridine with furan, J CHEM S P1, (2), 1999, pp. 171-177
Authors:
Kusano, E
Fukushima, K
Saitoh, T
Saiki, S
Kikuchi, N
Nanto, H
Kinbara, A
Citation: E. Kusano et al., Effects of Ar pressure on ion flux energy distribution and ion fraction inr.f.-plasma-assisted magnetron sputtering, SURF COAT, 121, 1999, pp. 189-193
Authors:
Kusano, E
Sato, A
Kikuchi, N
Nanto, H
Kinbara, A
Citation: E. Kusano et al., Preparation of TiC films by alternate deposition of Ti and C layers using a dual magnetron sputtering source, SURF COAT, 121, 1999, pp. 378-382
Authors:
Kusano, E
Kobayashi, T
Kashiwagi, N
Saitoh, T
Saiki, S
Nanto, H
Kinbara, A
Citation: E. Kusano et al., Ion energy distribution in ionized dc sputtering measured by an energy-resolved mass spectrometer, VACUUM, 53(1-2), 1999, pp. 21-24
Authors:
Kusano, E
Satoh, A
Kitagawa, M
Nanto, H
Kinbara, A
Citation: E. Kusano et al., Titanium carbide film deposition by DC magnetron reactive sputtering usinga solid carbon source, THIN SOL FI, 344, 1999, pp. 254-256
Authors:
Kusano, E
Kashiwagi, N
Kobayashi, T
Nanto, H
Kondo, I
Kinbara, A
Citation: E. Kusano et al., Effects of CH4 addition to Ar-O-2 discharge gases on resistivity and structure of ITO coatings, VACUUM, 51(4), 1998, pp. 785-789
Authors:
Kusano, E
Kitagawa, M
Kuroda, Y
Nanto, H
Kinbara, A
Citation: E. Kusano et al., Adhesion and hardness of compositionally gradient TiO2/Ti/TiN, ZrO2/Zr/ZrN, and TiO2/Ti/Zr/ZrN coatings, THIN SOL FI, 334(1-2), 1998, pp. 151-155