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Results: 1-17 |
Results: 17
USE OF ATTENUATED PHASE MASKS IN EXTREME-ULTRAVIOLET LITHOGRAPHY
Authors: WOOD OR WHITE DL BJORKHOLM JE FETTER LE TENNANT DM MACDOWELL AA LAFONTAINE B KUBIAK GD
Citation: Or. Wood et al., USE OF ATTENUATED PHASE MASKS IN EXTREME-ULTRAVIOLET LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2448-2451
PRECISION OPTICAL ASPHERES FOR EXTREME-ULTRAVIOLET LITHOGRAPHY
Authors: KANIA DR GAINES DP SWEENEY DS SOMMARGREN GE LAFONTAINE B VERNON SP TICHENOR DA BJORKHOLM JE ZERNIKE F KESTNER RN
Citation: Dr. Kania et al., PRECISION OPTICAL ASPHERES FOR EXTREME-ULTRAVIOLET LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3706-3708
ENVIRONMENTAL CERTIFICATION OF FOREST PRODUCTS
Authors: LAFONTAINE B
Citation: B. Lafontaine, ENVIRONMENTAL CERTIFICATION OF FOREST PRODUCTS, Appita journal, 49(6), 1996, pp. 380-383
PHASE-MEASURING INTERFEROMETRY USING EXTREME-ULTRAVIOLET RADIATION
Authors: BJORKHOLM JE MACDOWELL AA WOOD OR TAN Z LAFONTAINE B TENNANT DM
Citation: Je. Bjorkholm et al., PHASE-MEASURING INTERFEROMETRY USING EXTREME-ULTRAVIOLET RADIATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2919-2922
MODIFICATION OF THE COHERENCE OF UNDULATOR RADIATION
Authors: WHITE DL WOOD OR BJORKHOLM JE SPECTOR S MACDOWELL AA LAFONTAINE B
Citation: Dl. White et al., MODIFICATION OF THE COHERENCE OF UNDULATOR RADIATION, Review of scientific instruments, 66(2), 1995, pp. 1930-1933
AT-WAVELENGTH METROLOGY OF 13-NM LITHOGRAPHY IMAGING OPTICS
Authors: TAN ZQ MACDOWELL AA LAFONTAINE B BJORKHOLM JE TENNANT D TAYLOR D HIMEL M FREEMAN RR WASKIEWICZ WK WINDT DL SPECTOR S RAYCHAUDHURI AK STULEN RH NG W CERRINA F
Citation: Zq. Tan et al., AT-WAVELENGTH METROLOGY OF 13-NM LITHOGRAPHY IMAGING OPTICS, Review of scientific instruments, 66(2), 1995, pp. 2241-2243
SUBMICRON, SOFT-X-RAY FLUORESCENCE IMAGING
Authors: LAFONTAINE B MACDOWELL AA TAN ZQ WHITE DL TAYLOR GN WOOD OR BJORKHOLM JE TENNANT DM HULBERT SL
Citation: B. Lafontaine et al., SUBMICRON, SOFT-X-RAY FLUORESCENCE IMAGING, Applied physics letters, 66(3), 1995, pp. 282-284
REAL-TIME OBSERVATIONS OF EXTREME-ULTRAVIOLET AERIAL IMAGES BY FLUORESCENCE MICROIMAGING
Authors: LAFONTAINE B WHITE DL WOOD OR MACDOWELL AA TAN ZQ TAYLOR GN TENNANT DM HULBERT SL
Citation: B. Lafontaine et al., REAL-TIME OBSERVATIONS OF EXTREME-ULTRAVIOLET AERIAL IMAGES BY FLUORESCENCE MICROIMAGING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3576-3579
WAVELENGTH DEPENDENCE OF THE RESIST SIDEWALL ANGLE IN EXTREME-ULTRAVIOLET LITHOGRAPHY
Authors: WOOD OR BJORKHOLM JE FETTER L HIMEL MD TENNANT DM MACDOWELL AA LAFONTAINE B GRIFFITH JE TAYLOR GN WASKIEWICZ WK WINDT DL KORTRIGHT JB GULLIKSON EK NGUYEN K
Citation: Or. Wood et al., WAVELENGTH DEPENDENCE OF THE RESIST SIDEWALL ANGLE IN EXTREME-ULTRAVIOLET LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3841-3845
CHARACTERIZATION OF LASER-PRODUCED PLASMAS BY ULTRAVIOLET THOMSON SCATTERING
Authors: LAFONTAINE B BALDIS HA VILLENEUVE DM DUNN J ENRIGHT GD KIEFFER JC PEPIN H ROSEN MD MATTHEWS DL MAXON S
Citation: B. Lafontaine et al., CHARACTERIZATION OF LASER-PRODUCED PLASMAS BY ULTRAVIOLET THOMSON SCATTERING, Physics of plasmas, 1(7), 1994, pp. 2329-2341
STIMULATED BRILLOUIN-SCATTERING WITH A 1 PS LASER-PULSE IN A PERFORMED UNDERDENSE PLASMA
Authors: BATON SD ROUSSEAUX C MOUNAIX P LABAUNE C LAFONTAINE B PESME D RENARD N GARY S LOUISJACQUET M BALDIS HA
Citation: Sd. Baton et al., STIMULATED BRILLOUIN-SCATTERING WITH A 1 PS LASER-PULSE IN A PERFORMED UNDERDENSE PLASMA, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics, 49(5), 1994, pp. 180003602-180003605
SILYLATED POSITIVE TONE RESISTS FOR EUV LITHOGRAPHY AT 14 NM
Authors: TAYLOR GN HUTTON RS STEIN SM BOYCE CH LAFONTAINE B WHEELER DR KUBIAK GD
Citation: Gn. Taylor et al., SILYLATED POSITIVE TONE RESISTS FOR EUV LITHOGRAPHY AT 14 NM, Microelectronic engineering, 23(1-4), 1994, pp. 279-282
OPTIMIZATION OF X-RAY LASER GAIN IN NEON-LIKE GERMANIUM PLASMAS
Authors: VILLENEUVE DM ENRIGHT GD DUNN J LAFONTAINE B BALDIS HA KIEFFER JC NANTEL M
Citation: Dm. Villeneuve et al., OPTIMIZATION OF X-RAY LASER GAIN IN NEON-LIKE GERMANIUM PLASMAS, Canadian journal of physics, 72(11-12), 1994, pp. 793-801
ELECTRON-TEMPERATURE INHOMOGENEITIES ALONG AN X-RAY LASER PLASMA
Authors: LAFONTAINE B DUNN J BALDIS HA ENRIGHT GD VILLENEUVE DM KIEFFER JC NANTEL M PEPIN H
Citation: B. Lafontaine et al., ELECTRON-TEMPERATURE INHOMOGENEITIES ALONG AN X-RAY LASER PLASMA, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics, 47(1), 1993, pp. 583-590
STIMULATED BRILLOUIN-SCATTERING IN PICOSECOND TIME SCALES - EXPERIMENTS AND MODELING
Authors: BALDIS HA VILLENEUVE DM LAFONTAINE B ENRIGHT GD LABAUNE C BATON S MOUNAIX P PESME D CASANOVA M ROZMUS W
Citation: Ha. Baldis et al., STIMULATED BRILLOUIN-SCATTERING IN PICOSECOND TIME SCALES - EXPERIMENTS AND MODELING, Physics of fluids. B, Plasma physics, 5(9), 1993, pp. 3319-3327
DYNAMICS OF NE-LIKE POPULATIONS IN THE GERMANIUM X-RAY LASER
Authors: NANTEL M KIEFFER JC LAFONTAINE B PEPIN H ENRIGHT GD VILLENEUVE DM DUNN J BALDIS HA PEYRUSSE O
Citation: M. Nantel et al., DYNAMICS OF NE-LIKE POPULATIONS IN THE GERMANIUM X-RAY LASER, Physics of fluids. B, Plasma physics, 5(12), 1993, pp. 4465-4472
OBSERVATION OF PLASMA-WAVES BY THOMSON SCATTERING - SATURATION OF STIMULATED RAMAN-SCATTERING
Authors: VILLENEUVE DM BAKER KL DRAKE RP SLEAFORD B LAFONTAINE B ESTABROOK K PRASAD MK
Citation: Dm. Villeneuve et al., OBSERVATION OF PLASMA-WAVES BY THOMSON SCATTERING - SATURATION OF STIMULATED RAMAN-SCATTERING, Physical review letters, 71(3), 1993, pp. 368-371
Risultati: 1-17 |