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Results:
1-8
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Results: 8
Authors:
LAPADATU D
KITTILSLAND G
NESE M
NILSEN SM
JAKOBSEN H
Citation: D. Lapadatu et al., A MODEL FOR THE ETCH-STOP LOCATION ON REVERSE-BIASED PN JUNCTIONS, Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 259-267
Authors:
LAPADATU D
PUERS R
Citation: D. Lapadatu et R. Puers, ON THE ANODIC PASSIVATION OF SILICON IN AQUEOUS KOH SOLUTIONS, Sensors and actuators. A, Physical, 60(1-3), 1997, pp. 191-196
Authors:
LAPADATU D
PYKA A
DZIUBAN J
PUERS R
Citation: D. Lapadatu et al., CORRUGATED SILICON-NITRIDE MEMBRANES AS SUSPENSIONS IN MICROMACHINED SILICON ACCELEROMETERS, Journal of micromechanics and microengineering, 6(1), 1996, pp. 73-76
Authors:
PUERS R
LAPADATU D
Citation: R. Puers et D. Lapadatu, ELECTROSTATIC FORCES AND THEIR EFFECTS ON CAPACITIVE MECHANICAL SENSORS, Sensors and actuators. A, Physical, 56(3), 1996, pp. 203-210
Authors:
LAPADATU D
DECOOMAN M
PUERS R
Citation: D. Lapadatu et al., A DOUBLE-SIDED CAPACITIVE MINIATURIZED ACCELEROMETER BASED ON PHOTOVOLTAIC ETCH-STOP TECHNIQUE, Sensors and actuators. A, Physical, 53(1-3), 1996, pp. 261-266
Authors:
PEETERS E
LAPADATU D
PUERS R
SANSEN W
Citation: E. Peeters et al., PHET, AN ELECTRODELESS PHOTOVOLTAIC ELECTROCHEMICAL ETCHSTOP TECHNIQUE, Journal of microelectromechanical systems, 3(3), 1994, pp. 113-123
Authors:
PUERS B
LAPADATU D
Citation: B. Puers et D. Lapadatu, EXTREMELY MINIATURIZED CAPACITIVE MOVEMENT SENSORS USING NEW SUSPENSION SYSTEMS, Sensors and actuators. A, Physical, 41(1-3), 1994, pp. 129-135
Authors:
WOUTERS P
DECOOMAN M
LAPADATU D
PUERS R
Citation: P. Wouters et al., A LOW-POWER MULTISENSOR INTERFACE FOR INJECTABLE MICROPROCESSOR-BASEDANIMAL MONITORING-SYSTEM, Sensors and actuators. A, Physical, 41(1-3), 1994, pp. 198-206
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