Authors: BACHURIN VI LEPSHIN PA SMIRNOV VK CHURILOV AB

Citation: Vi. Bachurin et al., INFRARED-SPECTROSCOPY OF A SILICON SURFACE BOMBARDED BY NITROGEN-IONS, Technical physics letters, 24(3), 1998, pp. 214-216

Authors: BACHURIN VI LEPSHIN PA SMIRNOV VK CURILOV AB

Citation: Vi. Bachurin et al., INFRARED-SPECTROSCOPY OF SILICON-NITRIDE FORMATION UNDER ION SURFACE BOMBARDMENT, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 62(4), 1998, pp. 703-709

Authors: SMIRNOV VK LEPSHIN PA KRIVELEVICH SA KIBALOV DS

Citation: Vk. Smirnov et al., TOPOGRAPHY OF THE SILICON SURFACE BOMBARDED WITH NITROGEN-IONS AT VARIOUS ENERGIES AND ANGLES OF INCIDENCE, Inorganic materials, 34(11), 1998, pp. 1081-1084