Citation: K. Leonhardt et Hj. Tiziani, Optical topometry of surfaces with locally changing materials, layers, andcontaminations. Part 1: Topographic methods, based on two-beam interferometry, J MOD OPT, 46(1), 1999, pp. 101-114
Authors:
Tiziani, HJ
Windecker, R
Wegner, M
Leonhardt, K
Steudle, D
Fleischer, M
Citation: Hj. Tiziani et al., Measurement and description of microstructures with consideration of material-specific characteristics, TEC MES, 66(11), 1999, pp. 429-436