Authors:
YAMANAKA T
HASHIMOTO T
HASEGAWA N
TANAKA T
HASHIMOTO N
SHIMIZU A
OHKI N
ISHIBASHI K
SASAKI K
NISHIDA T
MINE T
TAKEDA E
NAGANO T
Citation: T. Yamanaka et al., ADVANCED TFT SRAM CELL TECHNOLOGY USING A PHASE-SHIFT LITHOGRAPHY, I.E.E.E. transactions on electron devices, 42(7), 1995, pp. 1305-1313