Authors: MOKTADIR Z CAMON H

Citation: Z. Moktadir et H. Camon, MONTE-CARLO SIMULATION OF ANISOTROPIC ETCHING OF SILICON - INVESTIGATION OF [111] SURFACE-PROPERTIES, Modelling and simulation in materials science and engineering, 5(5), 1997, pp. 481-488

Authors: CAMON H MOKTADIR Z

Citation: H. Camon et Z. Moktadir, SIMULATION OF SILICON ETCHING WITH KOH, Microelectronics, 28(4), 1997, pp. 509-517

Authors: CAMON H MOKTADIR Z DJAFARIROUHANI M

Citation: H. Camon et al., NEW TRENDS IN ATOMIC-SCALE SIMULATION OF WET CHEMICAL ETCHING OF SILICON WITH KOH, Materials science & engineering. B, Solid-state materials for advanced technology, 37(1-3), 1996, pp. 142-145

Authors: CAMON H MOKTADIR Z

Citation: H. Camon et Z. Moktadir, ATOMIC-SCALE SIMULATION OF SILICON ETCHED IN AQUEOUS KOH SOLUTION, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 27-29