AAAAAA
Results:
1-8
|
Results: 8
Authors:
MOON EE
EVERETT PN
RHEE K
SMITH HI
Citation: Ee. Moon et al., SIMULTANEOUS MEASUREMENT OF GAP AND SUPERPOSITION IN A PRECISION ALIGNER FOR X-RAY NANOLITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3969-3973
Authors:
SMITH HI
SCHATTENBURG ML
HECTOR SD
FERRERA J
MOON EE
YANG IY
BURKHARDT M
Citation: Hi. Smith et al., X-RAY NANOLITHOGRAPHY - EXTENSION TO THE LIMITS OF THE LITHOGRAPHIC PROCESS, Microelectronic engineering, 32(1-4), 1996, pp. 143-158
Authors:
MOON EE
EVERETT PN
SMITH HI
Citation: Ee. Moon et al., IMMUNITY TO SIGNAL DEGRADATION BY OVERLAYERS USING A NOVEL SPATIAL-PHASE-MATCHING ALIGNMENT SYSTEM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2648-2652
Authors:
WONG VV
FERRERA J
DAMASK JN
CARTER JM
MOON EE
HAUS HA
SMITH HI
RISHTON S
Citation: Vv. Wong et al., SPATIAL-PHASE-LOCKED ELECTRON-BEAM LITHOGRAPHY AND X-RAY-LITHOGRAPHY FABRICATING FIRST-ORDER GRATINGS ON RIB WAVE-GUIDES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3741-3745
Authors:
YANG IY
HU H
SU LT
WONG VV
BURKHARDT M
MOON EE
CARTER JM
ANTONIADIS DA
SMITH HI
RHEE KW
CHU W
Citation: Iy. Yang et al., HIGH-PERFORMANCE SELF-ALIGNED SUB-100 NM METAL-OXIDE-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS USING X-RAY-LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 4051-4054
Authors:
MOEL A
MOON EE
FRANKEL RD
SMITH HI
Citation: A. Moel et al., NOVEL ON-AXIS INTERFEROMETRIC ALIGNMENT METHOD WITH SUB-10-NM PRECISION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2191-2194
Authors:
YANOF AW
ZIPFEL GL
MOON EE
Citation: Aw. Yanof et al., X-RAY MASK MEMBRANE MOTION IN NARROW-GAP LITHOGRAPHY - HYDRODYNAMIC MODEL AND EXPERIMENT, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2920-2925
Authors:
MOON EE
Citation: Ee. Moon, A POSTULATIONAL FORMULATION OF THE MICHELSON-MORLEY EXPERIMENT, Physics essays, 6(4), 1993, pp. 487-491
Risultati:
1-8
|