Authors: LERCH W ROTERS G MUNZINGER P MADER R OSTERMEIR R

Citation: W. Lerch et al., WET RAPID THERMAL-OXIDATION OF SILICON WITH A PYROGENIC SYSTEM, Materials science & engineering. B, Solid-state materials for advanced technology, 54(3), 1998, pp. 153-160

Authors: MUNZINGER P LERCH W MADER R KOBAYASHI N

Citation: P. Munzinger et al., PYROGENIC WET OXIDATION BY RTP, Solid state technology, 41(6), 1998, pp. 121

Authors: KADING OW MATTHIAS E ZACHAI R FUSSER HJ MUNZINGER P

Citation: Ow. Kading et al., THERMAL DIFFUSIVITIES OF THIN DIAMOND FILMS ON SILICON, DIAMOND AND RELATED MATERIALS, 2(8), 1993, pp. 1185-1190