Citation: H. Fujiyama et al., Effects of crossed magnetic fields on silicon particles in plasma chemicalvapor deposition process, JPN J A P 1, 38(7B), 1999, pp. 4550-4555
Authors:
Tazoe, K
Yang, SC
Maemura, Y
Ohtsu, M
Fujiyama, H
Citation: K. Tazoe et al., Correlation between silicon particles and modulated crossed magnetic fieldin silane plasmas, THIN SOL FI, 341(1-2), 1999, pp. 55-58