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Wang, XD
Mahaffy, R
Tan, K
Shih, CK
Lee, JJ
Foisy, M
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McDonald, A
Mahaffy, R
Wang, XD
Kuklewicz, C
Shih, CK
Dennis, M
Tiffin, D
Kadoch, D
Duane, M
Citation: A. Mcdonald et al., Quantitative two-dimensional profiling of 0.35 mu m transistors with lightly doped drain structures, J VAC SCI B, 18(1), 2000, pp. 572-575
Authors:
Sun, YM
Endle, JP
Smith, K
Whaley, S
Mahaffy, R
Ekerdt, JG
White, JM
Hance, RL
Citation: Ym. Sun et al., Iridium film growth with iridium tris-acetylacetonate: oxygen and substrate effects, THIN SOL FI, 346(1-2), 1999, pp. 100-107