Citation: Afi. Morral et Pri. Cabarrocas, Shedding light on the growth of amorphous, polymorphous, protocrystalline and microcrystalline silicon thin films, THIN SOL FI, 383(1-2), 2001, pp. 161-164
Authors:
Hamers, EAG
Morral, AFI
Niikura, C
Brenot, R
Cabarrocas, PRI
Citation: Eag. Hamers et al., Contribution of ions to the growth of amorphous, polymorphous, and microcrystalline silicon thin films, J APPL PHYS, 88(6), 2000, pp. 3674-3688