Authors:
Kiepert, W
Obramski, HJ
Bolte, J
Brandt, K
Dietzel, D
Niebisch, F
Bein, BK
Citation: W. Kiepert et al., Plasma etching and ion implantation on silicon, characterized by laser-modulated optical reflectance, SURF COAT, 119, 1999, pp. 410-418
Authors:
Bolte, J
Niebisch, F
Pelzl, J
Stelmaszyk, P
Wieck, AD
Citation: J. Bolte et al., Study of the hot spot of an in-plane gate transistor by scanning Joule expansion microscopy, J APPL PHYS, 84(12), 1998, pp. 6917-6922