Authors:
Ziermann, R
von Berg, J
Obermeier, E
Wischmeyer, F
Niemann, E
Moller, H
Eickhoff, M
Krotz, G
Citation: R. Ziermann et al., High temperature piezoresistive beta-SiC-on-SOI pressure sensor with on chip SiC thermistor, MAT SCI E B, 61-2, 1999, pp. 576-578
Authors:
Kaindl, W
Lades, M
Kaminski, N
Niemann, E
Wachutka, G
Citation: W. Kaindl et al., Experimental characterization and numerical simulation of the electrical properties of nitrogen, aluminum, and boron in 4H/6H-SiC, J ELEC MAT, 28(3), 1999, pp. 154-160
Citation: F. Wischmeyer et al., Improvements of the SiC homoepitaxy process in a horizontal cold-wall CVD reactor, J ELEC MAT, 28(3), 1999, pp. 175-179