Authors:
Senzaki, Y
Alers, GB
Hochberg, AK
Roberts, DA
Norman, JAT
Fleming, RM
Krautter, H
Citation: Y. Senzaki et al., CVD of Zr-Sn-Ti-O thin films by direct injection of solventless liquid precursor mixtures, EL SOLID ST, 3(9), 2000, pp. 435-436
Citation: Y. Senzaki et al., MOCVD of high-k dielectrics, tantalum nitride and copper from directly injected liquid precursors, ADV MAT OPT, 10(3-5), 2000, pp. 93-103