Authors: DELLAGUARDIA R MALDONADO JR PREIN F ZELL T KLUWE A OERTEL HK

Citation: R. Dellaguardia et al., COMPARISON OF IMAGE SHORTENING EFFECTS IN X-RAY AND OPTICAL LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3936-3942

Authors: LESLIE T ARDEN W BENJACOB J COLEMAN D POLIMENI J PREIN F

Citation: T. Leslie et al., PHOTOLITHOGRAPHY OVERVIEW FOR 64 MEGABIT PRODUCTION, Microelectronic engineering, 25(1), 1994, pp. 67-74

Authors: LESLIE T ARDEN W BENJACOB J COLEMAN D POLIMENI J PREIN F

Citation: T. Leslie et al., PHOTOLITHOGRAPHY OVERVIEW FOR 64 MEGABIT PRODUCTION, Microelectronic engineering, 21(1-4), 1993, pp. 11-14