Authors:
TURCU ICE
ALLOT RM
MANN CM
REEVES C
ROSS IN
LISI N
MADDISON BJ
MOON SW
PREWETT P
STEVENSON JTM
ROSS AWS
GUNDLACH AM
KOEK B
MITCHELL P
ANASTASI P
MCCOARD C
KIM NS
Citation: Ice. Turcu et al., X-RAY MICROFABRICATION AND NANOFABRICATION USING A LASER-PLASMA SOURCE AT 1 NM WAVELENGTH, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2495-2502
Authors:
REEVES CM
TURCU ICE
STEVENSON JTM
ROSS AWS
GUNDLACH AM
PREWETT P
LAWES RA
ANASTASI P
BURGE R
MICHELL P
Citation: Cm. Reeves et al., FABRICATION OF 200NM FIELD-EFFECT TRANSISTORS BY X-RAY-LITHOGRAPHY USING A LASER-PLASMA X-RAY SOURCE, Microelectronic engineering, 30(1-4), 1996, pp. 187-190
Authors:
TURCU ICE
REEVES CM
STEVENSON JTM
ROSS AWS
GUNDLACH AM
PREWETT P
ANASTASI P
KOEK B
MITCHELL P
LAKE P
Citation: Ice. Turcu et al., 180NM X-RAY-LITHOGRAPHY WITH A HIGH-REPETITION-RATE LASER-PLASMA SOURCE, Microelectronic engineering, 27(1-4), 1995, pp. 295-298