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Results: 1-5 |
Results: 5

Authors: TURCU ICE ALLOT RM MANN CM REEVES C ROSS IN LISI N MADDISON BJ MOON SW PREWETT P STEVENSON JTM ROSS AWS GUNDLACH AM KOEK B MITCHELL P ANASTASI P MCCOARD C KIM NS
Citation: Ice. Turcu et al., X-RAY MICROFABRICATION AND NANOFABRICATION USING A LASER-PLASMA SOURCE AT 1 NM WAVELENGTH, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2495-2502

Authors: LIAO TD SHEARD S LI M ZHU JG PREWETT P
Citation: Td. Liao et al., HIGH-EFFICIENCY FOCUSING WAVE-GUIDE GRATING COUPLER WITH PARALLELOGRAMIC GROOVE PROFILES, Journal of lightwave technology, 15(7), 1997, pp. 1142-1148

Authors: SHEARD S LIAO TD YANG GG PREWETT P ZHU JG
Citation: S. Sheard et al., FOCUSING WAVE-GUIDE GRATING COUPLER USING A DIFFRACTIVE DOUBLET, Applied optics, 36(19), 1997, pp. 4349-4353

Authors: REEVES CM TURCU ICE STEVENSON JTM ROSS AWS GUNDLACH AM PREWETT P LAWES RA ANASTASI P BURGE R MICHELL P
Citation: Cm. Reeves et al., FABRICATION OF 200NM FIELD-EFFECT TRANSISTORS BY X-RAY-LITHOGRAPHY USING A LASER-PLASMA X-RAY SOURCE, Microelectronic engineering, 30(1-4), 1996, pp. 187-190

Authors: TURCU ICE REEVES CM STEVENSON JTM ROSS AWS GUNDLACH AM PREWETT P ANASTASI P KOEK B MITCHELL P LAKE P
Citation: Ice. Turcu et al., 180NM X-RAY-LITHOGRAPHY WITH A HIGH-REPETITION-RATE LASER-PLASMA SOURCE, Microelectronic engineering, 27(1-4), 1995, pp. 295-298
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