Authors:
BRUCHHAUS R
PITZER D
PRIMIG R
SCHREITER M
WERSING W
Citation: R. Bruchhaus et al., PZT THIN-FILMS GROWN BY MULTITARGET SPUTTERING - ANALYSIS OF THIN-FILM STRESS, Integrated ferroelectrics (Print), 21(1-4), 1998, pp. 461-467
Authors:
BRUCHHAUS R
PITZER D
PRIMIG R
SCHREITER M
WERSING W
NEUMANN N
HESS N
VOLLHEIM J
KOHLER R
SIMON M
Citation: R. Bruchhaus et al., A 11X6 ELEMENT PYROELECTRIC DETECTOR ARRAY UTILIZING SELF-POLARIZED PZT THIN-FILMS GROWN BY SPUTTERING, Integrated ferroelectrics, 17(1-4), 1997, pp. 369-376
Authors:
BRUCHHAUS R
PITZER D
PRIMIG R
WERSING W
XU YQ
Citation: R. Bruchhaus et al., DEPOSITION OF SELF-POLARIZED PZT FILMS BY PLANAR MULTITARGET SPUTTERING, Integrated ferroelectrics, 14(1-4), 1997, pp. 141-149