Authors:
Goyal, KO
Mahalingam, R
Pedrow, PD
Osman, MA
Citation: Ko. Goyal et al., Mass transport characteristics in a pulsed plasma enhanced chemical vapor deposition reactor for thin polymer film deposition, IEEE PLAS S, 29(1), 2001, pp. 42-50
Authors:
Shepsis, LV
Pedrow, PD
Mahalingam, R
Osman, MA
Citation: Lv. Shepsis et al., Modeling and measurement of monomer pressure evolution in an inductively coupled pulsed plasma reactor for thin polymer films, IEEE PLAS S, 28(6), 2000, pp. 2172-2178