Authors:
RANGSTEN P
HEDLUND C
KATARDJIEV IV
BACKLUND Y
Citation: P. Rangsten et al., ETCH RATES OF CRYSTALLOGRAPHIC PLANES IN Z-CUT QUARTZ - EXPERIMENTS AND SIMULATION, Journal of micromechanics and microengineering, 8(1), 1998, pp. 1-6
Citation: P. Rangsten et al., ELECTROSTATICALLY EXCITED DIAPHRAGM DRIVEN AS A LOUDSPEAKER, Sensors and actuators. A, Physical, 52(1-3), 1996, pp. 211-215