Authors:
Stenkamp, D
Kienzle, O
Orchowski, A
Rau, WD
Weickenmeier, A
Benner, G
Wetzke, M
Waskiewicz, W
Katsap, V
Zhu, X
Liu, H
Munro, E
Rouse, JA
Citation: D. Stenkamp et al., Progress on the realization of the electron column modules for SCALPEL high-throughput/alpha electron projection lithography tools, MICROEL ENG, 57-8, 2001, pp. 137-143
Authors:
Schwander, P
Rau, WD
Kisielowski, C
Gribelyuk, M
Ourmazd, A
Citation: P. Schwander et al., Defect processes in semiconductors studied at the atomic level by transmission electron microscopy, SEM SEMIMET, 51, 1999, pp. 225-259
Authors:
Rau, WD
Schwander, P
Baumann, FH
Hoppner, W
Ourmazd, A
Citation: Wd. Rau et al., Two-dimensional mapping of the electrostatic potential in transistors by electron holography, PHYS REV L, 82(12), 1999, pp. 2614-2617