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Results: 4

Authors: Stenkamp, D Kienzle, O Orchowski, A Rau, WD Weickenmeier, A Benner, G Wetzke, M Waskiewicz, W Katsap, V Zhu, X Liu, H Munro, E Rouse, JA
Citation: D. Stenkamp et al., Progress on the realization of the electron column modules for SCALPEL high-throughput/alpha electron projection lithography tools, MICROEL ENG, 57-8, 2001, pp. 137-143

Authors: Rau, WD Schwander, P Ourmazd, A
Citation: Wd. Rau et al., Two-dimensional mapping of pn junctions by electron holography, PHYS ST S-B, 222(1), 2000, pp. 213-217

Authors: Schwander, P Rau, WD Kisielowski, C Gribelyuk, M Ourmazd, A
Citation: P. Schwander et al., Defect processes in semiconductors studied at the atomic level by transmission electron microscopy, SEM SEMIMET, 51, 1999, pp. 225-259

Authors: Rau, WD Schwander, P Baumann, FH Hoppner, W Ourmazd, A
Citation: Wd. Rau et al., Two-dimensional mapping of the electrostatic potential in transistors by electron holography, PHYS REV L, 82(12), 1999, pp. 2614-2617
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