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Results: 1-12 |
Results: 12
NEW DESIGNS OF MICROMACHINED VIBRATING RATE GYROSCOPES WITH DECOUPLEDOSCILLATION MODES
Authors: GEIGER W FOLKMER B SOBE U SANDMAIER H LANG W
Citation: W. Geiger et al., NEW DESIGNS OF MICROMACHINED VIBRATING RATE GYROSCOPES WITH DECOUPLEDOSCILLATION MODES, Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 118-124
SILICON THERMAL MICRORELAYS WITH MULTIPLE SWITCHING STATES
Authors: HILTMANN K ASHAUER M SANDMAIER H LANG W
Citation: K. Hiltmann et al., SILICON THERMAL MICRORELAYS WITH MULTIPLE SWITCHING STATES, Sensors and actuators. A, Physical, 62(1-3), 1997, pp. 612-615
THE VAMP - A NEW DEVICE FOR HANDLING LIQUIDS OR GASES
Authors: STEHR M MESSNER S SANDMAIER H ZENGERLE R
Citation: M. Stehr et al., THE VAMP - A NEW DEVICE FOR HANDLING LIQUIDS OR GASES, Sensors and actuators. A, Physical, 57(2), 1996, pp. 153-157
APPLICATIONS OF POROUS SILICON MICROSTRUCTURING
Authors: LANG W STEINER P SANDMAIER H
Citation: W. Lang et al., APPLICATIONS OF POROUS SILICON MICROSTRUCTURING, Journal of micromechanics and microengineering, 5(2), 1995, pp. 175-176
IMPROVEMENT IN SIGNAL EVALUATION METHODS FOR SEMICONDUCTOR GAS SENSORS
Authors: ENDRES HE GOTTLER W JANDER HD DROST SM SANDMAIER H SBERVEGLIERI G FAGLIA G PEREGO C
Citation: He. Endres et al., IMPROVEMENT IN SIGNAL EVALUATION METHODS FOR SEMICONDUCTOR GAS SENSORS, Sensors and actuators. B, Chemical, 27(1-3), 1995, pp. 267-270
POROUS SILICON - A NOVEL MATERIAL FOR MICROSYSTEMS
Authors: LANG W STEINER P SANDMAIER H
Citation: W. Lang et al., POROUS SILICON - A NOVEL MATERIAL FOR MICROSYSTEMS, Sensors and actuators. A, Physical, 51(1), 1995, pp. 31-36
SPECIAL ISSUE ON MICROFLUIDICS - INTRODUCTION
Authors: SANDMAIER H
Citation: H. Sandmaier, SPECIAL ISSUE ON MICROFLUIDICS - INTRODUCTION, Journal of micromechanics and microengineering, 4(4), 1994, pp. 157-157
LIGHT-EMITTING-DIODES IN POROUS SILICON
Authors: KOZLOWSKI F STEINER P LANG W SANDMAIER H
Citation: F. Kozlowski et al., LIGHT-EMITTING-DIODES IN POROUS SILICON, Sensors and actuators. A, Physical, 43(1-3), 1994, pp. 153-156
APPLICATION OF POROUS SILICON AS A SACRIFICIAL LAYER
Authors: LANG W STEINER P RICHTER A MARUSCZYK K WEIMANN G SANDMAIER H
Citation: W. Lang et al., APPLICATION OF POROUS SILICON AS A SACRIFICIAL LAYER, Sensors and actuators. A, Physical, 43(1-3), 1994, pp. 239-242
AMORPHOUS-SILICON CARBIDE AND ITS APPLICATION IN SILICON MICROMACHINING
Authors: KLUMPP A SCHABER U OFFEREINS HL KUHL K SANDMAIER H
Citation: A. Klumpp et al., AMORPHOUS-SILICON CARBIDE AND ITS APPLICATION IN SILICON MICROMACHINING, Sensors and actuators. A, Physical, 41(1-3), 1994, pp. 310-316
POROUS SILICON LIGHT-EMITTING P-N-JUNCTION
Authors: LANG W STEINER P KOZLOWSKI F SANDMAIER H
Citation: W. Lang et al., POROUS SILICON LIGHT-EMITTING P-N-JUNCTION, Journal of luminescence, 57(1-6), 1993, pp. 169-173
A SQUARE-DIAPHRAGM PIEZORESISTIVE PRESSURE SENSOR WITH A RECTANGULAR CENTRAL BOSS FOR LOW-PRESSURE RANGES
Authors: SANDMAIER H KUHL K
Citation: H. Sandmaier et K. Kuhl, A SQUARE-DIAPHRAGM PIEZORESISTIVE PRESSURE SENSOR WITH A RECTANGULAR CENTRAL BOSS FOR LOW-PRESSURE RANGES, I.E.E.E. transactions on electron devices, 40(10), 1993, pp. 1754-1759
Risultati: 1-12 |