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Results: 4

Authors: SPITZER RC ORZECHOWSKI TJ PHILLION DW KAUFFMAN RL CERJAN C
Citation: Rc. Spitzer et al., CONVERSION EFFICIENCIES FROM LASER-PRODUCED PLASMAS IN THE EXTREME-ULTRAVIOLET REGIME, Journal of applied physics, 79(5), 1996, pp. 2251-2258

Authors: SPITZER RC KAUFFMAN RL ORZECHOWSKI T PHILLION DW CERJAN C
Citation: Rc. Spitzer et al., SOFT-X-RAY PRODUCTION FROM LASER-PRODUCED PLASMAS FOR LITHOGRAPHY APPLICATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2986-2989

Authors: KAUFFMAN RL PHILLION DW SPITZER RC
Citation: Rl. Kauffman et al., X-RAY-PRODUCTION - 13 NM FROM LASER-PRODUCED PLASMAS FOR PROJECTION X-RAY-LITHOGRAPHY APPLICATIONS, Applied optics, 32(34), 1993, pp. 6897-6900

Authors: GAINES DP SPITZER RC CEGLIO NM KRUMREY M ULM G
Citation: Dp. Gaines et al., RADIATION HARDNESS OF MOLYBDENUM SILICON MULTILAYERS DESIGNED FOR USEIN A SOFT-X-RAY PROJECTION LITHOGRAPHY SYSTEM, Applied optics, 32(34), 1993, pp. 6991-6998
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