Authors:
Popov, VP
Antonova, IV
Stas, VF
Gutakovskii, AK
Spesivtsev, EV
Mardegzhov, AS
Franznusov, AA
Feofanov, GN
Citation: Vp. Popov et al., Properties of extremely thin silicon layer in silicon-on-insulator structure formed by smart-cut technology, MAT SCI E B, 73(1-3), 2000, pp. 82-86
Authors:
Popov, VP
Antonova, IV
Gutakovsky, AK
Spesivtsev, EV
Morosov, II
Citation: Vp. Popov et al., Ellipsometry and microscopy study of nanocrystalline Si : H layers formed by high dose implantation of silicon, MAT SCI E B, 73(1-3), 2000, pp. 120-123