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Results:
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Results: 22
Authors:
Melvas, P
Kalvesten, E
Stemme, G
Citation: P. Melvas et al., A surface-micromachined resonant-beam pressure-sensing structure, J MICROEL S, 10(4), 2001, pp. 498-502
Authors:
Niklaus, F
Enoksson, P
Griss, P
Kalvesten, E
Stemme, G
Citation: F. Niklaus et al., Low-temperature wafer-level transfer bonding, J MICROEL S, 10(4), 2001, pp. 525-531
Authors:
Griss, P
Enoksson, P
Tolvanen-Laakso, HK
Merilainen, P
Ollmar, S
Stemme, G
Citation: P. Griss et al., Micromachined electrodes for biopotential measurements, J MICROEL S, 10(1), 2001, pp. 10-16
Authors:
Melvas, P
Kalvesten, E
Stemme, G
Citation: P. Melvas et al., Media protected surface micromachined leverage beam pressure sensor, J MICROM M, 11(6), 2001, pp. 617-622
Authors:
Niklaus, F
Kalvesten, E
Stemme, G
Citation: F. Niklaus et al., Wafer-level membrane transfer bonding of polycrystalline silicon bolometers for use in infrared focal plane arrays, J MICROM M, 11(5), 2001, pp. 509-513
Authors:
Niklaus, F
Enoksson, P
Kalvesten, E
Stemme, G
Citation: F. Niklaus et al., Low-temperature full wafer adhesive bonding, J MICROM M, 11(2), 2001, pp. 100-107
Authors:
Andersson, H
Jonsson, C
Moberg, C
Stemme, G
Citation: H. Andersson et al., Consecutive microcontact printing - ligands for asymmetric catalysis in silicon channels, SENS ACTU-B, 79(1), 2001, pp. 78-84
Authors:
Andersson, H
van der Wijngaart, W
Griss, P
Niklaus, F
Stemme, G
Citation: H. Andersson et al., Hydrophobic valves of plasma deposited octafluorocyclobutane in DRIE channels, SENS ACTU-B, 75(1-2), 2001, pp. 136-141
Authors:
Andersson, H
van der Wijngaart, W
Nilsson, P
Enoksson, P
Stemme, G
Citation: H. Andersson et al., A valve-less diffuser micropump for microfluidic analytical systems, SENS ACTU-B, 72(3), 2001, pp. 259-265
Authors:
Kunz, K
Enoksson, P
Stemme, G
Citation: K. Kunz et al., Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors, SENS ACTU-A, 92(1-3), 2001, pp. 156-160
Authors:
Niklaus, F
Andersson, H
Enoksson, P
Stemme, G
Citation: F. Niklaus et al., Low temperature full wafer adhesive bonding of structured wafers, SENS ACTU-A, 92(1-3), 2001, pp. 235-241
Authors:
Andersson, H
van der Wijngaart, W
Stemme, G
Citation: H. Andersson et al., Micromachined filter-chamber array with passive valves for biochemical assays on beads, ELECTROPHOR, 22(2), 2001, pp. 249-257
Authors:
Andersson, H
Jonsson, C
Moberg, C
Stemme, G
Citation: H. Andersson et al., Patterned self-assembled beads in silicon channels, ELECTROPHOR, 22(18), 2001, pp. 3876-3882
Authors:
Corman, T
Kalvesten, E
Huiku, M
Weckstrom, K
Merilainen, PT
Stemme, G
Citation: T. Corman et al., An optical IR-source and CO2-chamber system for CO2 measurements, J MICROEL S, 9(4), 2000, pp. 509-516
Authors:
Ebefors, T
Mattsson, JU
Kalvesten, E
Stemme, G
Citation: T. Ebefors et al., A robust micro conveyer realized by arrayed polimide joint actuators, J MICROM M, 10(3), 2000, pp. 337-349
Authors:
Melin, J
Enoksson, P
Corman, T
Stemme, G
Citation: J. Melin et al., A low-pressure encapsulated deep reactive ion etched resonant pressure sensor electrically excited and detected using 'burst' technology, J MICROM M, 10(2), 2000, pp. 209-217
Authors:
Corman, T
Enoksson, P
Noren, K
Stemme, G
Citation: T. Corman et al., A low-pressure encapsulated resonant fluid density sensor with feedback control electronics, MEAS SCI T, 11(3), 2000, pp. 205-211
Authors:
Andersson, H
van der Wijngaart, W
Enoksson, P
Stemme, G
Citation: H. Andersson et al., Micromachined flow-through filter-chamber for chemical reactions on beads, SENS ACTU-B, 67(1-2), 2000, pp. 203-208
Authors:
Olsson, A
Stemme, G
Stemme, E
Citation: A. Olsson et al., Numerical and experimental studies of flat-walled diffuser elements for valve-less micropumps, SENS ACTU-A, 84(1-2), 2000, pp. 165-175
Authors:
Corman, T
Noren, K
Enoksson, P
Melin, J
Stemme, G
Citation: T. Corman et al., "Burst" technology with feedback-loop control for capacitive detection andelectrostatic excitation of resonant silicon sensors, IEEE DEVICE, 47(11), 2000, pp. 2228-2235
Authors:
Olsson, A
Stemme, G
Stemme, E
Citation: A. Olsson et al., A numerical design study of the valveless diffuser pump using a lumped-mass model, J MICROM M, 9(1), 1999, pp. 34-44
Authors:
Veijola, T
Corman, T
Enoksson, P
Stemme, G
Citation: T. Veijola et al., Dynamic simulation model for a vibrating fluid density sensor, SENS ACTU-A, 76(1-3), 1999, pp. 213-224
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