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Results:
1-15
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Results: 15
Authors:
KAMLET LI
TERRY FL
Citation: Li. Kamlet et Fl. Terry, DIELECTRIC FUNCTION MODELING FOR IN1-YALYAS ON INP, Thin solid films, 313, 1998, pp. 177-182
Authors:
BENSON TE
RAMAMOORTHY A
KAMLET LI
TERRY FL
Citation: Te. Benson et al., HIGH-SPEED, HIGH-ACCURACY OPTICAL MEASUREMENTS OF POLYCRYSTALLINE SILICON FOR PROCESS-CONTROL, Thin solid films, 313, 1998, pp. 435-441
Authors:
VINCENT TL
KHARGONEKAR PP
TERRY FL
Citation: Tl. Vincent et al., AN EXTENDED KALMAN FILTERING-BASED METHOD OF PROCESSING REFLECTOMETRYDATA FOR FAST IN-SITU ETCH RATE MEASUREMENTS, IEEE transactions on semiconductor manufacturing, 10(1), 1997, pp. 42-51
Authors:
HANISH CK
GRIZZLE JW
CHEN HH
KAMLET LI
THOMAS S
TERRY FL
PANG SW
Citation: Ck. Hanish et al., MODELING AND ALGORITHM DEVELOPMENT FOR AUTOMATED OPTICAL ENDPOINTING OF AN HBT EMITTER ETCH, Journal of electronic materials, 26(12), 1997, pp. 1401-1408
Authors:
KAMLET LI
TERRY FL
MARACAS GN
Citation: Li. Kamlet et al., A TEMPERATURE-DEPENDENT MODEL FOR THE COMPLEX DIELECTRIC FUNCTION OF GAAS, Journal of electronic materials, 26(12), 1997, pp. 1409-1416
END-POINT AND ETCH RATE CONTROL USING DUAL-WAVELENGTH LASER REFLECTOMETRY WITH A NONLINEAR ESTIMATOR
Authors:
VINCENT TL
KHARGONEKAR PP
TERRY FL
Citation: Tl. Vincent et al., END-POINT AND ETCH RATE CONTROL USING DUAL-WAVELENGTH LASER REFLECTOMETRY WITH A NONLINEAR ESTIMATOR, Journal of the Electrochemical Society, 144(7), 1997, pp. 2467-2472
Authors:
BENSON TE
KAMLET LI
RUEGSEGGER SM
HANISH CK
HANISH PD
RASHAP BA
KLIMECKY P
FREUDENBERG JS
GRIZZLE JW
KHARGONEKAR PP
TERRY FL
BARNEY B
Citation: Te. Benson et al., SENSOR SYSTEMS FOR REAL-TIME FEEDBACK-CONTROL OF REACTIVE ION ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(1), 1996, pp. 483-488
Authors:
TERRY FL
Citation: Fl. Terry, ON REINVENTING THE MASTERS-DEGREE, Laser focus, 31(10), 1995, pp. 63-63
Authors:
RASHAP BA
ELTA ME
ETEMAD H
FOURNIER JP
FREUDENBERG JS
GILES MD
GRIZZLE JW
KABAMBA PT
KHARGONEKAR PP
LAFORTUNE S
MOYNE JR
TENEKETZIS D
TERRY FL
Citation: Ba. Rashap et al., CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT - REAL-TIME FEEDBACK-CONTROL OF A REACTIVE ION ETCHER, IEEE transactions on semiconductor manufacturing, 8(3), 1995, pp. 286-297
Authors:
HANISH PD
GRIZZLE JW
GILES MD
TERRY FL
Citation: Pd. Hanish et al., A MODEL-BASED TECHNIQUE FOR REAL-TIME ESTIMATION OF ABSOLUTE FLUORINECONCENTRATION IN A CF4 AR PLASMA/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1802-1807
Authors:
KAMLET LI
TERRY FL
Citation: Li. Kamlet et Fl. Terry, A COMPOSITION-DEPENDENT MODEL FOR THE COMPLEX DIELECTRIC FUNCTION OF IN1-XGAXASYP1-Y LATTICE-MATCHED TO INP, Journal of electronic materials, 24(12), 1995, pp. 2005-2013
Authors:
MCGREGOR DS
ROJESKI RA
KNOLL GF
TERRY FL
EAST J
EISEN Y
Citation: Ds. Mcgregor et al., EVIDENCE FOR FIELD ENHANCED ELECTRON-CAPTURE BY EL2 CENTERS IN SEMIINSULATING GAAS AND THE EFFECT ON GAAS RADIATION DETECTOR (VOL 75, PG 7910, 1994), Journal of applied physics, 77(3), 1995, pp. 1331-1331
Authors:
MCGREGOR DS
ROJESKI RA
KNOLL GF
TERRY FL
EAST J
EISEN Y
Citation: Ds. Mcgregor et al., PRESENT STATUS OF UNDOPED SEMIINSULATING LEC BULK GAAS AS A RADIATIONSPECTROMETER, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 343(2-3), 1994, pp. 527-538
Authors:
MCGREGOR DS
ROJESKI RA
KNOLL GF
TERRY FL
EAST J
EISEN Y
Citation: Ds. Mcgregor et al., EVIDENCE FOR FIELD ENHANCED ELECTRON-CAPTURE BY EL2 CENTERS IN SEMIINSULATING GAAS AND THE EFFECT ON GAAS RADIATION DETECTORS, Journal of applied physics, 75(12), 1994, pp. 7910-7915
Authors:
SHERWIN ME
MUNNS GO
ELTA ME
WOELK EG
CRARY SB
TERRY FL
HADDAD GI
Citation: Me. Sherwin et al., THE OPTIMIZATION OF INXGA1-XAS AND INP GROWTH-CONDITIONS BY CBE (VOL 111, PG 594, 1991), Journal of crystal growth, 129(3-4), 1993, pp. 794-794
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1-15
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