Authors: SHANK SM SOAVE RJ THEN AM TASKER GW

Citation: Sm. Shank et al., FABRICATION OF HIGH-ASPECT-RATIO STRUCTURES FOR MICROCHANNEL PLATES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2736-2740

Authors: SOAVE RJ TASKER GW THEN AM MAYER JW SHACHAMDIAMAND Y

Citation: Rj. Soave et al., A NOVEL TECHNIQUE FOR CHARACTERIZING THE SURFACE COVERAGE OF THIN-FILM CHEMICAL-VAPOR-DEPOSITION IN ULTRA-HIGH-ASPECT-RATIO MICROSTRUCTURES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1027-1031

Authors: SNIDER GL THEN AM SEAVE RJ TASKER GW

Citation: Gl. Snider et al., HIGH-ASPECT-RATIO DRY-ETCHING FOR MICROCHANNEL PLATES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3327-3331