Authors:
Tarre, A
Rosental, A
Sammelselg, V
Uustare, T
Citation: A. Tarre et al., Comparative study of low-temperature chloride atomic-layer chemical vapor deposition of TiO2 and SnO2, APPL SURF S, 175, 2001, pp. 111-116
Authors:
Rosental, A
Tarre, A
Adamson, P
Gerst, A
Kasikov, A
Niilisk, A
Citation: A. Rosental et al., Surface of TiO2 during atomic layer deposition as determined by incremental dielectric reflection, APPL SURF S, 142(1-4), 1999, pp. 204-209