Citation: Dc. Tully et al., Dendrimers with thermally labile end groups: An alternative approach to chemically amplified resist materials designed for sub-100 nm lithography, ADVAN MATER, 12(15), 2000, pp. 1118
Authors:
Tully, DC
Trimble, AR
Frechet, JMJ
Wilder, K
Quate, CF
Citation: Dc. Tully et al., Synthesis and preparation of ionically bound dendrimer monolayers and application toward scanning probe lithography, CHEM MATER, 11(10), 1999, pp. 2892-2898