AAAAAA
Results: 26-37/37
Authors:
Granier, A
Vallee, C
Goullet, A
Aumaille, K
Turban, G
Citation: A. Granier et al., Experimental investigation of the respective roles of oxygen atoms and electrons in the deposition of SiO2 in O-2/TEOS helicon plasmas, J VAC SCI A, 17(5), 1999, pp. 2470-2474
Authors:
Houlet, L
Rhallabi, A
Turban, G
Citation: L. Houlet et al., Microscopic modeling of InP etching in CH4-H-2 plasma, J VAC SCI A, 17(5), 1999, pp. 2598-2606
Authors:
Hong, JG
Turban, G
Citation: Jg. Hong et G. Turban, Deposition of amorphous nitrogenated carbon films using an alternate plasma deposition method in a dual electron cyclotron resonance-radio frequency plasma, J VAC SCI A, 17(1), 1999, pp. 314-316
Authors:
Vallee, C
Granier, A
Aumaille, K
Cardinaud, C
Goullet, A
Coulon, N
Turban, G
Citation: C. Vallee et al., Chemical etching of thin SiOxCyHz films by post-deposition exposure to oxygen plasma, APPL SURF S, 139, 1999, pp. 57-61
Authors:
Gogolides, E
Vauvert, P
Courtin, Y
Kokkoris, G
Pelle, R
Boudouvis, A
Turban, G
Citation: E. Gogolides et al., SiO2 and Si etching in fluorocarbon plasmas: A detailed surface model coupled with a complete plasma and profile simulator., MICROEL ENG, 46(1-4), 1999, pp. 311-314
Authors:
Hong, J
Goullet, A
Turban, G
Citation: J. Hong et al., Ellipsometry and Raman study on hydrogenated amorphous carbon (a-C : H) films deposited in a dual ECR-r.f. plasma, THIN SOL FI, 352(1-2), 1999, pp. 41-48
Authors:
Clenet, F
Briaud, P
Lemperiere, G
Turban, G
Citation: F. Clenet et al., Experimental and modeling study of the sputtered particle transport in an r.f. magnetron discharge, THIN SOL FI, 346(1-2), 1999, pp. 290-298
Authors:
Marechal, C
Zeinert, A
Zellama, K
Lacaze, E
Zarrabian, M
Turban, G
Citation: C. Marechal et al., Correlation between surface morphology and optical properties for different types of hydrogenated amorphous carbon films grown by plasma enhanced chemical vapour deposition, SOL ST COMM, 109(1), 1999, pp. 23-28
Authors:
Bhattacharyya, S
Granier, A
Turban, G
Citation: S. Bhattacharyya et al., Growth, microstructure and electronic properties of amorphous carbon nitride films investigated by plasma diagnostics, J APPL PHYS, 86(8), 1999, pp. 4668-4676
Authors:
Bhattacharyya, S
Vallee, C
Cardinaud, C
Chauvet, O
Turban, G
Citation: S. Bhattacharyya et al., Studies on structural properties of amorphous nitrogenated carbon films from electron energy loss, ellipsometry, Auger electron spectroscopy, and electron-spin resonance, J APPL PHYS, 85(4), 1999, pp. 2162-2169
Authors:
Racine, B
Benlahsen, M
Zellama, K
Zarrabian, M
Villain, JP
Turban, G
Grosman, A
Citation: B. Racine et al., Hydrogen stability in diamond-like carbon films during wear tests, APPL PHYS L, 75(22), 1999, pp. 3479-3481
Authors:
Bhattacharyya, S
Turban, G
Citation: S. Bhattacharyya et G. Turban, Studies on the electronic properties, microstructure and growth of amorphous carbon nitride films prepared in electron cyclotron resonance plasma, RRD APP PHY, 1, 1998, pp. 219-249