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Baszynski, J
Winiarski, A
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Talik, E
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Winiarski, A
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Piotrowska, A
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Citation: M. Guziewicz et al., Characteristics of sputter-deposited TiN, ZrB2 and W2B diffusion barriers for advanced metallizations to GaAs, SOL ST ELEC, 43(6), 1999, pp. 1055-1061