Citation: J. Wohle et al., Comparison of radio frequency and pulsed-d.c. plasma CVD of Ti-C-N-H and Zr-C-N-H layers at low temperature, SURF COAT, 142, 2001, pp. 661-664
Authors:
Wohle, J
Pfohl, C
Rie, KT
Gebauer-Teichmann, A
Kim, SK
Citation: J. Wohle et al., Deposition of TiCN and ZrCN layers on light metals by PACVD method using radio frequency and pulsed-DC plasma, SURF COAT, 131(1-3), 2000, pp. 127-130